Used NOVELLUS Concept 2 Dual Speed Sequel #9314381 for sale
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ID: 9314381
Wafer Size: 8"
Vintage: 2000
CVD System, 8"
Mainframe
Gas box: Standard with dual divert
Robot: Express dual blade
Cool down: 3 Slots
Endpoint: Dual wavelength endpoint
Sequel chamber:
Sequel express TEOS
Sigma 6 TEOS Cabinet
(2) Speed chambers
PFEIFFER 1600L Turbo
2000 vintage.
NOVELLUS Concept 2 Dual Speed Sequel (also known as the C2DSS) is a reactor designed for semiconductor processing. It utilizes a proprietary dual-speed architecture to provide superior process control, especially with highly challenging materials. The C2DSS is a high-efficiency, multi-zone, numerical-controlled chemical reaction equipment that allows for precise temperature control, process control, and scalability. The system also features advanced vector-control monitoring of all reaction parameters. The C2DSS has a dual-speed architecture, allowing the operator to change between two different process speeds depending on the application. This allows for higher throughput without sacrificing process control. This helps in applications where complex physical features and material properties must be precisely controlled. The unit also features temperature monitoring and control, automatic pressure adjustment, and dynamic power control for energy conservation. The C2DSS is designed for a wide range of deposition processes and can process various materials, including silicon, silicide, and multilayer materials. Its sophisticated design also allows for excellent uniformity and closed-loop process control. Additionally, the machine has built-in safety features, including process interlocks, automatic shutdown, and vibration monitors. The advanced temperature control of the C2DSS is capable of reaching very high temperatures of up to 1000˚C while maintaining optimal homogeneity and uniformity. This allows for thermal processes such as gas-phase etching, dry etching, and CVD epitaxy. The tool also features an advanced gas recirculation asset that provides maximal reaction stability and safety during operation. The C2DSS is easy to operate and can be reconfigured quickly for different application needs. In addition, it comes with a wide range of accessories and is compatible with various computer-aided process control (CPC) software packages. The model is versatile and can be used for technology development, process optimization, process integration, and production. Overall, Concept 2 Dual Speed Sequel (C2DSS) is a powerful and versatile reactor designed specifically for semiconductor processing. Its dual-speed architecture, advanced temperature control, and efficient handling of different materials makes it a reliable and precise solution for a variety of applications.
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