Used NOVELLUS CONCEPT 2 Sequel Express #9259415 for sale

NOVELLUS CONCEPT 2 Sequel Express is a reactor designed for the semiconductor industry. It is a compact, single-wafer process tool with a self-contained chamber that is capable of thermal chemical vapor deposition (CVD) processes including low-temperature polysilicon, silicon nitride, silicon oxide, tungsten, aluminum/copper, dielectric, and other specialty processes. CONCEPT 2 Sequel Express is designed for optimal process capability in a controlled environment, providing reliable operation and uniformity as well as high production throughput. It is also optimized for fast-cycle times, capable of running up to 8 wafer diameters per minute. The tool operates with a relatively low total chamber pressure, typically around 2 Torr, and is designed with a disposable all-ceramic substrate carrier, eliminating handling and cleaning issues typically present with traditional quartz susceptor carriers. NOVELLUS CONCEPT 2 Sequel Express offers additional flexibility by providing the ability to easily configure front end and back end modules. In terms of hardware, CONCEPT 2 Sequel Express utilizes an electrostatic chuck for improved uniformity and precise control of wafer temperature. This is complemented by a control equipment for temperature, position, vacuum, and process gas. Additional components include a pumping system, process chamber, process gas systems, process vessel, process heat source, heated exhaust, and load locks. The advanced design of NOVELLUS CONCEPT 2 Sequel Express CVD chamber is engineered to optimize process results, reduce contamination, and maximize throughput. It is also designed with features that enhance process safety, including an active detection unit for process gas leaks and a dual-insulation package for the anode. CONCEPT 2 Sequel Express is a highly configurable machine that provides excellent uniformity and consistency as well as reliable and repeatable processing. Its simple design ensures easy operation and maintenance, while the ability to configure modules for specific jobs provides flexibility for various applications. All of these features make NOVELLUS CONCEPT 2 Sequel Express an ideal tool for CVD processing in the semiconductor industry.