Used NOVELLUS CONCEPT 2 Sequel Express #9362147 for sale

NOVELLUS CONCEPT 2 Sequel Express is an innovative chemical vapor deposition (CVD) reactor designed specifically for the production of integrated circuit products. CONCEPT 2 Sequel Express takes advantage of some of the latest advances in semiconductor manufacturing technology to offer a cost-effective, high performance CVD platform for the processing of ultra-small feature size wafers. NOVELLUS CONCEPT 2 Sequel Express features a removable substrate holder with a large "X-Y" motion range that enables the rapid exchange of up to 10 wafers in under two minutes. This reduces substrate handling time and maintains the integrity of the highly volatile product. The substrate holder features removable inserts that enable substrate-specific alignment to ensure perfect film uniformity and adhesion. The reactor also integrates intelligent software to enable optimized processing conditions to be established quickly and easily. CONCEPT 2 Sequel Express includes a high-powered Process Module that employs an array of powerful multi-channel gas injection valves to provide precise control over gas ratios and gas flows. The Process Module also includes an Avotec® NOX® Computer-Controlled Process sequencer to manage gas flow and to automatically inject antireactions if undesired residues are detected. NOVELLUS CONCEPT 2 Sequel Express is equipped with Pulsed Heat Tower Equipment (PHTS) and in-situ cleaning systems designed to ensure a high-quality process. The PHTS is designed to deliver a wide range of temperatures with high accuracy, which enables improved processing. The system also includes an on-module coolant unit which can precisely control the wafer temperature for optimal deposition of polysilicon films. CONCEPT 2 Sequel Express also features a number of enhanced safety features designed to protect personnel and the environment. The machine includes a patented low-pressure Explosive Potential Device (EPD) that effectively eliminates the risk of explosions in the chamber due to hazardous gas build-up. A fully automated emergency shutdown tool is also included to protect personnel in the event of catastrophic failure. Overall, NOVELLUS CONCEPT 2 Sequel Express reactor is a powerful CVD asset that is engineered to deliver a highly reliable, cost-effective deposition process for high volume production of ultra-small feature size wafers. The model's advanced features and intelligent software enable improved performance and safety, and will help you maximize the productivity of your manufacturing operations.