Used NOVELLUS CONCEPT 2 Speed Sequel #172487 for sale
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NOVELLUS CONCEPT 2 Speed Sequel is amongst the latest additions to the Concept 2 Speed range of reactors from NOVELLUS. It is targeted at the advanced semiconductor manufacturing sector, enabling easy and cost effective wafer process capability upgrades. CONCEPT 2 Speed Sequel is designed to provide users with higher throughput rates than traditional single wafer tool architecture, while delivering superior control and repeatable process performance even at very high wafer speeds. NOVELLUS CONCEPT 2 Speed Sequel builds on the capabilities of the original Concept 2 Speed tool and provides two distinct levels of process control. This includes high resolution layer imaging, real-time chamber management, and tight process monitoring for a wide range of advanced materials processes. The reactor is built on the Concept 2 Speed architecture, featuring a UV Photo-Assisted CVD (PECVD) process chamber and gas delivery equipment. It is capable of precisely controlling film thickness uniformity across the wafer surface and delivers excellent production yields at high wafer speeds. The unique design of CONCEPT 2 Speed Sequel equips the system with an efficient gas shielding technology, providing excellent protection to prevent side wall oxidation and plasma coupling of the process. The reactor also features a advanced controller unit which can be easily programmed to complete complex multi-step processes with the minimum of effort. The advanced control machine can be pre-set with user-defined parameters and the tool can execute recipes with exceptional accuracy, repeatability and yields. To provide further flexibility, NOVELLUS CONCEPT 2 Speed Sequel has an in-situ monitoring and analysis capability that can monitor the reactor environment and wafer process in real time. This helps to ensure a consistent process across different wafers and prevent process variations. In conclusion, CONCEPT 2 Speed Sequel is an efficient and reliable reactor designed to meet the needs of advanced semiconductor production. It is capable of providing users with a high level of flexibility, process control and repeatability, along with improved throughput rates and excellent yields.
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