Used NOVELLUS CONCEPT 2 Speed #293600182 for sale

Manufacturer
NOVELLUS
Model
CONCEPT 2 Speed
ID: 293600182
Wafer Size: 8"
System, 8" (3) Process chambers.
NOVELLUS CONCEPT 2 Speed is a two-chamber chemical vapor deposition (CVD) reactor designed to facilitate the deposition of high quality films with superior repeatability and process control. CONCEPT 2 Speed reactor is well-suited for a wide range of applications, including the deposition of diamond-like carbon (DLC) films and other surface coatings. The reactor consists of a chamber and a process chamber. The chamber contains a highly efficient, single-phase clockwork system that provides exact ramp speeds and precise pressure control. This, coupled with a heated stage for uniform substrate temperature, creates consistently flawless results. The process chamber is equipped with two high-speed gas injection systems, which are capable of injecting uniform amounts of gases into the process chamber. These gases come from either the chamber or a gas-mixing system, and are then directed to various parts of the process chamber to achieve the desired results. NOVELLUS CONCEPT 2 Speed reactor is designed with high reliability to produce materials with excellent coating quality and uniformity. The deposition process utilizes a precise two-phase control system for optimizing deposition rate and uniformity. This consists of a heater for controlling the temperature profile of the substrate material and an ozone generator that controls gas concentration in the process chamber. In addition, CONCEPT 2 Speed reactor offers several advanced features to control the deposition process. These include pre-programmed recipes, multiple process monitoring and feedback systems, and a graphical user interface for quick, easy operation. The advanced technology and engineering employed in NOVELLUS CONCEPT 2 Speed reactor results in improved performance, higher yields, and a consistent, reliable production process. Its compact size and low maintenance requirements make it an ideal choice for small-scale research projects and industrial production.
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