Used NOVELLUS CONCEPT 2 #9188218 for sale

NOVELLUS CONCEPT 2 is a plasma enhanced chemical vapor deposition (PECVD) reactor designed to deliver superior equipment performance. It is a highly advanced, automated tool suitable for deposition of a wide range of materials, copper, chrome, and aluminum being among them. CONCEPT 2 is equipped with multiple active zone sources that produce the highly-efficient, controllable and clean deposition process. The key feature that sets NOVELLUS CONCEPT 2 performance apart from competing products is its extremely high process repeatability and uniformity. This is achieved through the use of two independently-operated TEM cell-based sources that are tuned precisely to maintain high process accuracy at all times. The system is base-mounted, an upgradable platform that can add features and functionality for users to address specific application requirements. It features a compact, ergonomic design, allowing for installation and operation within limited space. CONCEPT 2 is able to support a wide range of advanced applications, from single wafer to high-throughput production applications. The system incorporates feedback control and monitoring equipment to ensure repeatability and high yields. Automatic control and monitoring equipment monitor and measure the deposition rate, temperature variations, and gas flow; offering the highest level of process performance and parameter control available in the industry. It is equipped with the Advanced Gas Distribution (AGD) technology, an exclusive NOVELLUS technology that precisely controls the delivery of reacting gases to the substrate surface, allowing more uniformity and control than traditional gas delivery systems. NOVELLUS CONCEPT 2 is capable of providing uniform and repeatable results, utilizing low thermal budget deposition. This is due to the combination of CONCEPT 2's increased process control via the AGD technology and its precision deposition rate control, a feature that allows users to adjust deposition rate within a single run with amazing accuracy and repeatability to avoid mask edge overcoats and provides excellent aspect ratio filling with minimal top clamp shadowing. NOVELLUS CONCEPT 2 is a next-generation, fully automated tool that provides superior performance and precise control compared to competing products. The automated process monitoring, control and feedback systems make CONCEPT 2 an ideal choice for advanced deposition applications, offering great repeatability and high yields.