Used NOVELLUS CONCEPT 2 #9262616 for sale

NOVELLUS CONCEPT 2 reactor is a state-of-the-art production tool specifically designed to enhance the metal deposition process for the fabrication of semiconductor chips. The reactor is ideally suited for narrow to mid-pitch copper RDL (redistribution layer) and multiple dielectric material (MDM) deposition. This type of deposition is a crucial step in the fabrication process of advanced microchip devices. CONCEPT 2 reactor features a unique process chamber that applies caustic-pumped pressure to the process and a tubular environment of backside operation that optimizes deposition uniformity and step coverage. This chamber also houses a low-pressure vapor equipment for controlling process temperature safely and efficiently. This system helps to ensure uniformity and repeatability throughout the deposition process. NOVELLUS CONCEPT 2 also includes an integrated advanced process control unit that monitors and regulates pressure, temperature, gas supply, and other parameters across the substrate, in order to ensure maximum process control. This feature ensures consistent high-quality deposits with minimal variations. CONCEPT 2 includes a built-in variable frequency generator that offers adjustable frequencies, multi-frequency operation, and high-speed power frequency switching capabilities. This generator creates a pulsed RF energy field that helps to improve the performance of the deposition process. NOVELLUS CONCEPT 2 is capable of automated inert gas operation, ensuring uniform gas loading and pressure control over the entire substrate, as well as controlling internal injector heights and segment temperatures individually. This feature allows for precise control of process flow and helps to ensure consistent performance. CONCEPT 2 also offers high-efficiency particle capture technology, improving particle performance during deposition processes, and increasing cycle times. The reactor features a contactless vibration isolation machine, which isolates vibration from the substrate, resulting in improved throughput and uniformity. In conclusion, NOVELLUS CONCEPT 2 reactor is an advanced production tool designed to enhance the metal deposition process for the fabrication of semiconductor chips. The reactor's integrated process control tool, variable frequency generator, inert gas operation, and particle capture technology all help to increase cycle times and improve process performance and control.