Used NOVELLUS Concept 3 Speed Max #9259681 for sale

Name: NOVELLUS Concept 3 Speed Max
Brand: NOVELLUS
SKU: 9259681
Availability: SoldOut

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Reactors

Manufacturer

NOVELLUS

Model

Concept 3 Speed Max

ID: 9259681

CVD System, 12" Wafer type: Notch Signal tower PEC Module Foop: BROOKS AUTOMATION Foop type: 3-Port BROOKS Magnatran 7 TM Robot TM Robot blade: Ceramic Load lock convectron: 275 min L/L Baratron: MKS TM Baratron: MKS L/L Slit valve type: VAT Module slit valve type: SMC PFEIFFER TM Turbo pump MKS TM Throttle valve VAT TM Line valve BROOKS AUTOMATION ATM Robot ATM Robot blade: Arm metal AWC Sensor UI Type: LCD EMO's: Push button Host interface: SECS Chaser: CRT Monitor IOC Version: 4.72 SSD Type: C3-PDRS (3) SMC XGT300-30-1A-X2 TM Value, P/N: 60-251903-00 Load lock value: VAT 03012-LA24-0001/0503, A-62591 Chamber A, B and C: Chamber type: Speed max Chamber process: ILD ESC Type: Notch Manometer (10T): MKS Manometer (30T): MKS Manometer (100m): MKS Throttle valve: NC TBV-IQA-200-NW-50 Dual pedestal lift LEYBOLD MAG200CT Turbo pump ESC / Dome Cooling Dual clean injector kit: Single RPC Process clean type: RPC Temperature monitoring: Dome monitor 201 ADVANCED ENERGY 10013 Navigator RF Match VERITY EPD, P/N: 1005972 Black shield MOOG SMART Motor No module dry pump Chamber A: Type / Make / Model / Gases / Size MFC / BROOKS AUTOMATION / SLA 7950S / O2 / 500 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / NF3 / 5 SLM MFC / BROOKS AUTOMATION / SLA 7950S / H2/CF: 0.727 / 1.5 SLPM MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 3000 SCCM MFC / HORIBA / Stec (Z500, SEC-Z512MGX) / N2 / 300 SCCM MFC / HORIBA / Stec (Z500, SEC-Z512MGX) / SiH4 / 200 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 500 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / HE / 1000 SCCM Chamber B: Type / Make / Model / Gases / Size MFC / BROOKS AUTOMATION / SLA 7950S / O2 / 500 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / NF3 / 5 SLM MFC / BROOKS AUTOMATION / SLA 7950S / H2 / 1500 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 3 SLPM MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 100 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 200 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 500 SCCM UPC / BROOKS AUTOMATION / SLA 7950S / HE / 1000 SCCM Chamber C: Type / Make / Model / Gases / Size MFC / BROOKS AUTOMATION / SLA 7950S / O2 / 500 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / NF3 / 0.5 SLPM MFC / BROOKS AUTOMATION / SLA 7950S / H2 / 1500 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 3000 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 100 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / SiH4 / 200 SCCM MFC / BROOKS AUTOMATION / SLA 7950S / Ar / 500 SCCM UPC / BROOKS AUTOMATION / SLA 7950S / HE / 1000 SCCM Missing parts: MC3 Controller: MKS AX7670-21 3L Remote Plasma Source (RPS) NTM Delta controller PDX 5000 / PDX 8000 / Apex 10K Generators Turbo pump controllers Missing parts for chamber A, B and C: Apex 10013 HF Generator PDX 8000 MF Generator PDX 5000 LF Generator NTM Uninterruptable Power Supply (UPS): 208 V, 50/60 Hz, 4-Wires Power supply: 208 V, 50/60 Hz, 5-Wires 2007 vintage.

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NOVELLUS Concept 3 Speed Max is an advanced chemical vapor deposition (CVD) reactor designed with improved material films formation and process time reduction capabilities. It has been mainly developed for use in the semiconductor industry, particularly for the deposition of dielectrics and metals. The Speed Max reactor consists of a reaction chamber, a process gas delivery equipment, control system, and heating unit. The reaction chamber is a glass enclosed stainless steel vessel equipped with automated accessories to ensure accurate deposition rates. The process gas delivery machine enables the control and regulation of gas pressures, temperatures, and humidity. The heating tool is powerful and designed to sustain an even temperature throughout the chamber. The reactor is also equipped with an advanced control asset which enables the accurate manipulation of process parameters such as the process pressure, temperature, gas flow, as well as the deposition rates. The real-time monitoring of the chamber conditions, including the temperature, pressure, and gas flow, are also possible via this model. The Speed Max also features a unique batch-style deposition which is designed to minimize material deposition time. The reactor can be pre-programmed to deposit films in predetermined batches, enabling faster, automated production. Furthermore, the equipment can be configured with multiple substrate holders to further speed up the process. The reactor has also been designed to offer superior process repeatability, which is essential to ensure satisfactory film formation. Furthermore, the system's advanced software ensures repeatable process results regardless of the environmental conditions. Lastly, the software also helps in diagnosing and optimizing any potential process issues. Concept 3 Speed Max is a powerful and highly advanced reactor and a must-have for semiconductor manufacturers. It promises the most precise and quick deposition process with repeatable results. The Speed Max now offers a competitive edge to those in the industry who are looking for the most up-to-date deposition methodologies.