Used NOVELLUS Concept 3 Speed Max #9410799 for sale
URL successfully copied!
NOVELLUS Concept 3 Speed Max is an advanced chemical vapor deposition reactor for use in semiconductor manufacturing. It is designed to provide high performance and high throughput to support the most advanced semiconductor technologies. The reactor utilizes a unique two stage multi-frequency strip equipment to provide a high level of substrate heating uniformity, improved plasma uniformity, and enhanced process repeatability. Concept 3 Speed Max has a modular architecture, allowing it to be configured to various wafer sizes and process requirements. The reactor is capable of sustaining a wide range of gas flows, temperatures, and pressures, allowing for optimal control of the deposition process. Additionally, the system is equipped with real-time temperature compensation to ensure uniform gap fill and density control, as well as an Automated Wafer Transfer technology that reduces cross-contamination and improves loading and unloading times. NOVELLUS Concept 3 Speed Max has a fully automated end-point detection unit, providing faster cycle times while enhancing repeatability. The reactor also has a data acquisition machine that allows for real-time data analysis and process optimization. The tool also utilizes a Thermal Shock Reduction Asset to improve front surface uniformity and prevent hot spots. This helps to reduce stress-induced defects and improve the long-term reliability of the device. All of these features make Concept 3 Speed Max one of the most advanced reactors available. The reactor offers an unparalleled level of performance and repeatability, which allows for faster production, higher yields, and better reliability. Additionally, it is designed to be fully scalable and configurable to the needs of each user. NOVELLUS Concept 3 Speed Max is a powerful deposition solution that can benefit any semiconductor manufacturer seeking high-quality, high-performance results.
There are no reviews yet