Used NOVELLUS Concept 3 Speed NEXT #9203466 for sale
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ID: 9203466
Wafer Size: 12"
Vintage: 2005
CVD System, 12"
System information:
Process: STI/IMD
Slit valve type: SMC L-Motion
TM Turbo pump model: PFEIFFER TMH261 PXS
TM Throttle valve model: MKS
TM Baratron model: MKS
Loadlock baratron: MKS
IOC Version: V 4.6
TM Robot type: Mag 7
TM Robot blade: Ceramic
Wafer sensor: Existence
Single tower
Front monitor: 12" LCD
Fab
EMO's: Push button
Host interface: GEM
ATM Robot: ATR8
VAC Robot: MAG 7
Loadlock valve: SMC
ATM Loadlock valve: VAT
Pod loader: BROOKS Fixload 6M
Module A / B / C:
Chamber type: NeXT
Chamber Process: SIT/IMP
Process clean type: NPP RPC
Module controller: MC3
Module turbo pump: LEYBOLD MAGW2000CT
Pendulum valve: MKS
Temperature monitoring: NTM500
HF Generator: AE 10K
MF Generator: AE PDX_5000
LF Generator: AE PDX_8Q00
RF Match: AE Navigator 10013 U
IOC Version: V4.72
Dual clean injector kit
Injector type: Star short
Louvered screen
Pedestal lift type: Servo motor
Foreline type: Large
EPD
Black shield
Module A:
Chamber gas box:
MFC Gas MFC Size MFC Model
MFC1 SiH4 100 sccm BROOKS SLA7950S
MFC2 SiH4 200 sccm BROOKS SLA7950S
MFC8 Ar 3000 sccm BROOKS SLA7950S
MFC5 H2 1500 sccm BROOKS GF125C
MFC3 NF3 5000 sccm BROOKS SLA7950S
MFC9 02 500 sccm BROOKS SLA7950S
MFC6 Ar 500 sccm BROOKS SLA7950S
MFC7 HE 1000 sccm BROOKS SLA7950S
Module B:
Chamber gas box:
MFC Gas MFC Size MFC Model
MFC1 SiH4 100 sccm BROOKS GF125C
MFC8 Ar 3000 sccm BROOKS SLA7950S
MFC5 H2 1500 sccm BROOKS SLA7950S
MFC3 NF3 5000 sccm BROOKS GF125C
MFC9 02 500 sccm BROOKS SLA7950S
MFC7 HE 1000 sccm BROOKS SLA7950S
Module C:
Chamber gas box:
MFC Gas MFC Size MFC Model
MFC1 SiH4 100 sccm BROOKS SLA7950S
MFC2 SiH4 200 sccm BROOKS SLA7950S
MFC8 Ar 3000 sccm BROOKS GF125C
MFC5 H2 1500 sccm BROOKS GF125C
MFC3 NF3 5000 sccm BROOKS GF125C
MFC9 02 500 sccm BROOKS SLA7950S
MFC6 Ar 500 sccm BROOKS SLA7950S
MFC7 HE 1000 sccm BROOKS SLA7950S
UPS Power: 120 V, 3¢, 3 Wires
Power: 208 V, 3¢, 5 Wires
2005 vintage.
NOVELLUS Concept 3 Speed NEXT reactor is a state-of-the-art chemical-mechanical planarization (CMP) tool designed to provide significant advances in polishing control, efficiency, and repeatability. Concept 3 Speed NEXT incorporates PECVD technology for fast deposition and a unique, high-speed short-stroke polishing equipment for improved performance. This system is capable of delivering increased throughput, improved uniformity, and superior repeatability as compared to conventional CMP systems. NOVELLUS Concept 3 Speed NEXT's advanced, linear-motion positioning mechanism allows for faster, more precise polishing operations. This makes it ideal for high production runs with delicate topography. The unique design also significantly reduces wafer damage associated with the polishing process. Concept 3 Speed NEXT also features an electro-thermal stabilization unit that maintains uniform temperature across the surface of a wafer during CMP operations, thus ensuring consistent polishing results. NOVELLUS Concept 3 Speed NEXT is equipped with a number of advanced control systems to ensure optimal performance. These include a closed-loop servo mechanism that automatically sets polishing speed, force, and pressure, as well as a dynamic pressure compensation machine and a temperature-controlled cleaning capability. The reactive chamber also allows chemical promoters and inhibitors to be added during the polishing process for improved CMP results. Concept 3 Speed NEXT also features a number of safety features, such as a ceramic heating element and an automatic wafer cassette load capability to further minimize potential injury. Advanced diagnostics and predictive maintenance tools help to ensure that NOVELLUS Concept 3 Speed NEXT is always in peak operating condition. In summary, Concept 3 Speed NEXT is a reliable, state-of-the-art chemical-mechanical polishing tool. Its advanced features provide superior throughput, uniformity, and repeatability compared to traditional CMP systems. Numerous sophisticated control systems ensure optimized performance and reliable results. Additionally, safety features and predictive maintenance tools further minimize the risk of injury.
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