Used NOVELLUS CONCEPT 3 Speed XT #9258492 for sale

NOVELLUS CONCEPT 3 Speed XT Reactor is a modular high-throughput vacuum equipment designed specifically for semiconductor fabrication processes. This system consists of the Reactor Chamber, a pumping unit and the process module. The reactor chamber is a unique stepper-motor-powered steel frame, designed to move up, down, or around while operating. It features a high-throughput modular loadlock machine that can be configured for multiple applications including deposition, etch and surface modification. The pumping tool is comprised of a vacuum pump, a throttle valve, gas throttle lines, and filters. It has a high-throughput dialysis asset that enables low-pressure and high-throughput operations. The vacuum pump has a multi-stage design that ensures reliable and efficient clean operation, while the throttle valve allows adjustment of model pressure for optimal performance. Also featured is a programmable thermal controller and gas throttle lines that enable accurate control of gas flow and temperature. The process module is the most important component of CONCEPT 3 Speed XT Reactor. It includes a process chamber, an isolation region, a power supply, process automation, and cryogenic systems. The process chamber features proprietary homogenous process control for uniformity in both chemical and crystalline structures. It also has hardware, software, and automatic robot automation functions for high throughput processing. The isolation region isolates sensitive components from the active environment of the chamber, ensuring the continual operation of the equipment. The power supply provides a high precision DC voltage for efficient operation. Finally, the cryogenic system reduces heat and improves the uniformity of the process. Overall, NOVELLUS CONCEPT 3 Speed XT Reactor is an advanced, modular semiconductor fabrication unit with unique features for high throughput processing. Its modular loadlock machine is easily configurable to accommodate various applications, while its pumping tool is highly efficient and reliable. Its process module is the centerpiece of this asset, boasting efficient and precise control of chemical and crystalline structures. This model is ideal for any semiconductor fabrication process, providing fast and reliable processing at very high throughputs.