Used NOVELLUS Concept 3 Speed XT #9382870 for sale

NOVELLUS Concept 3 Speed XT Reactor is a revolutionary revolutionary technology for heavy etching and highly advanced CVD deposition. The X-series is a patented, modular equipment designed to enable fast processing time, superior uniformity, and increased yields. It is perfect for high volume production with a large variety of substrates. With its three-speed configuration, robust design, and superior process control, Concept 3 Speed XT Reactor provides unprecedented precision and reproducibility for the most demanding processes. The reactor is highly versatile and able to operate with both wet and PECVD methods. It features an open-cage configuration which allows a higher process uniformity and lower operating costs compared to its predecessors. It is also energy efficient due to its integrated heat transfer system, which reduces heat generation and maximizes the efficiency of the unit. The integrated intelligent tool control allows for efficient handling of complex recipes and quick setup of processes. NOVELLUS Concept 3 Speed XT Reactor offers the highest reflective and absorptive materials-handling capability in its class with an auto-cleaning machine that reduces the risk of contamination and improves productivity. Its Auto-shim feature allows for easy adjustment of the tool's surface level to meet changing process requirements, while the gas-handling tool uses the integrated sensors for advanced gas flow control. Concept 3 Speed XT Reactor provides industry-leading low particle levels on product substrates with advanced process monitoring features. With its tight pressure and temperature control, this reactor ensures a high level of process quality and reliability, as well as offering the highest yield-to-cost ratio across its range of substrates. It also offers a high degree of flexibility, allowing for easy reconfiguration to tailor the production process for each customer and their application. NOVELLUS Concept 3 Speed XT Reactor is the perfect choice for high-volume production with demanding requirements. Its robust, secure design, integrated heat transfer asset, and advanced process control features ensure maximum performance and uniformity. The Auto-shim and gas-handling model make for faster setup and more efficient handling of multiple substrates and complex recipes. Furthermore, its low-particle design ensures the highest yields and best-in-class process quality.