Used NOVELLUS Concept 3 Speed #9263261 for sale
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ID: 9263261
Wafer Size: 12"
Vintage: 2004
CVD System, 12"
Process: Nitride
Main frame (EFEM / TM)
Chamber A, B and C
AC Rack
RF Rack
2004 vintage.
NOVELLUS Concept 3 Speed is a tool-less, modular process reactor designed for high-precision process development. This equipment provides fast tool-less configuration to minimize downtime and maximize user productivity. With its high-speed process control capability, quick tool-less setup, and the ability to quickly adjust and optimize process recipes, Concept 3 Speed offers a low-risk manufacturing solution for developing and productionizing advanced processes. NOVELLUS Concept 3 Speed is a versatile manufacturing device, capable of handling a wide range of processes. It is equipped with a wide range of comfortable features, such as: a modern, user-friendly touch screen user interface; multiple nozzles for clean and controlled deposition of product; variable flow controls for different process parameters, such as temperature, pressure, and vacuum; direct current substrate bias; and fast, clean switching between process gases to maximize productivity and minimize downtime. Concept 3 Speed's modular architecture allows users to configure and expand the system with customizable features and upgrades, for the greatest unit flexibility. Its modular design is also beneficial in terms of maintenance - replacement components can be quickly and easily swapped out, without sacrificing machine performance or functionality. NOVELLUS Concept 3 Speed also offers an advanced, integrated monitoring and data collection tool, allowing users to log and review critical process data in real time. This asset is designed to be both highly reliable and highly scalable, allowing users to collect and store data from multiple reactors and/or production sites. This data can then be used to monitor process performance, for statistical process control and other important engineering and process development tasks. Concept 3 Speed's advanced configuration options allow for precise control of the entire production process, and its robust and reliable systems are designed to help ensure that the highest production quality is maintained. Moreover, with its tool-less configuration and quick, clean switching between process recipes, NOVELLUS Concept 3 Speed is an ideal machine for cost-effective, precise, and rapid production of advanced processes.
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