Used NOVELLUS Concept 3 Vector Express #9246247 for sale

NOVELLUS Concept 3 Vector Express is a single-wafer batch-type chemical vapor deposition (CVD) reactor, designed to provide precise and repeatable film deposition of semiconductor device materials. The reactor is capable of depositing a wide array of materials, including oxides, nitrides, metals and dielectrics, and is ideal for the production of modern, high-performance devices. Concept 3 Vector Express is based around two interconnected chemical vapor deposition (CVD) chambers, each of which has its own heater and susceptor. The susceptors can be individually and independently moved to and from the heating zone, providing an adjustable process window. The Vector Express can also include up to three precursors, which can be injected into the chamber to deposit different layers, all with a single process. NOVELLUS Concept 3 Vector Express is also capable of exceeding 1.3 nanometer uniformity of oxide, nitride and embedded-gate structures, enabling the production of next-generation ultra-small transistors and high-performance semiconductor devices. The equipment features a high transmission, X-ray Quality Enhanced Design, providing superior oxide compaction and film thickness uniformity, as well as enhanced lifetime of critical components. Concept 3 Vector Express also includes a number of safety features, providing both operator and system protection. A unique 'jog' feature, for example, allows for rapid selection of different process recipes from the unit's Programming Portal, as well as providing a range of process options. In addition, the machine's self-adjusting wafer size can compensate for variations in the substrate size or shape, reducing variability. Finally, the Vector Express has a self-diagnostic feature, which can identify subtleties in the process data and take corrective action before the process becomes out of specs. This improves both process repeatability and reliability, ultimately resulting in higher yields. In sum, NOVELLUS Concept 3 Vector Express is a state-of-the-art CVD reactor for the implementation of advanced semiconductor device processes. With its precisely programmable susceptors, high-precision X-ray quality components and a unique jog feature, the Vector Express is designed for the efficient production of today's smallest, most reliable and highest performance semiconductor devices.