Used NOVELLUS CONCEPT 3 #293644792 for sale

Manufacturer
NOVELLUS
Model
CONCEPT 3
ID: 293644792
Vintage: 2005
System Does not include turbo pump 2005 vintage.
NOVELLUS CONCEPT 3 reactor is a chemical vapor deposition (CVD) tool used in semiconductor manufacturing. It has a high-purity gaseous environment, capable of producing advanced, high-performance semiconductor materials. CONCEPT 3 reactor utilizes advanced, proprietary designs to attain optimal performance for theuser. The overall design of NOVELLUS CONCEPT 3 reactor consists of a chamber which houses the process for various gaseous chemistries. There are two chambers located at either side of the central chamber, with a plenum and manifold connecting the chambers. A diffusion chamber is also connected to the central chamber, enabling the chemistries to be dispersed during the process. All of the chamber components work together to create the optimal process conditions for intricate projects. The gas inlet manifold of CONCEPT 3 reactor is capable of delivering up to three different chemistries in an efficient manner, while still providing a consistent level of process control. The equipment can automatically and accurately regulate the flow of the chemistries and the pressure within the chamber, ensuring the desired results. Once the gas is delivered to the chamber, it is heated with radiative heating elements, which allow the chemical reaction to begin. The overall process is facilitated by a number of tools located on the chamber walls, including sensors, heaters, etc. As the process progresses, various detectors inside the chamber monitor temperature and flow, always making certain the process is running smoothly. Once the desired results are achieved, the highly reactive by-product components are quickly and efficiently removed from the chamber with the use of an exhaust system. This exhaust unit is comprised of a scrubber, afterburner, high-efficiency filter, and a chemical sealer, all of which work together to ensure safety and a clean work environment. NOVELLUS CONCEPT 3 reactor is a reliable and powerful CVD tool, designed to create high-performance materials for the semiconductor industry. It offers automated process control, efficient gas delivery, and a safe, clean exhaust machine, making it a cost-effective tool with long-term reliability.
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