Used NOVELLUS CONCEPT One-150 #9250100 for sale

NOVELLUS CONCEPT One-150 (C1-150) is a vertical CVD reactor designed for high-volume production and high throughput. The C1-150 offers flexibility and dependability, with configurable automation, customizable process parameters, and a streamlined design. The C1-150 is built with a robust construction and heavy-duty components, enabling it to handle extreme pressures of up to 20 Torr (2.7 kPa) and temperatures of up to 2000°C. The C1-150 has a variable, vertical, low-pressure reactor chamber, fitted with an integrated pumping equipment, a high-performance thermal monitoring system, and a low-temperature preservation unit. It is capable of accommodating three sources of deposition, including liquid, gas, and vapor-phase environments, and can run for up to 14 hours at a time. The C1-150 offers four available capacities: PAD (Planar-Array Deposition), a 21-inch wafer capacity; COP (Closed-Loop Oxide Processing), a 200-micron thickness capacity; Dielectric Etch, a 10-micron depth capacity; and Metal Etch, a 1-micron depth capacity. The C1-150 is equipped with a SCADA (supervisory control and data acquisition) machine, allowing users to control the tool, monitor the useful process parameters in real-time, and integrate into existing systems. The C1-150 is also fitted with a fully-automatic source architecture for optimized process control, capable of self-compensating to maintain stability of process. It has an advanced control asset, offering a configurable array of parameters and securely storing data for up to 99 recipes. The C1-150 is designed for cleanroom fabrication, with a controlled pressure and temperature operating environment to ensure top-level process stability. It offes configurable safety features like pressure relief valves, temperature protection mechanisms, and digital temperature controllers. The C1-150 is also fitted with a particle scrubbing model, an ionized oxygen cleaning equipment, an ozone injection system, and an HEPA filter. Its advanced safety systems, coupled with the integrated process recipe library, allows users to customize the C1-150 to meet their specific needs.