Used NOVELLUS CONCEPT One-150 #9311436 for sale

NOVELLUS CONCEPT One-150 is an industry-leading ultra-low pressure reactor that specializes in CVD and MVG-type processes. It provides superior control and repeatability of conditions, and offers a full suite of process options enabling advanced production. This reactor is designed for both pilot scale and production scale manufacturing applications. NOVELLUS CONCEPT ONE 150 features a polymer-lined chamber with a volume capacity of up to 150 liters. It also offers a full range of process control parameters, including pressure, temperature, and gas flow. The equipment is configured with up to two heated and cooled process coils, a sweeping filtration system, and a flexible pressure platform that serves both process and safety requirements. Additionally, the unit includes a range of advanced diagnostic capabilities, integral metrology tools, and real-time analysis of product quality. CONCEPT ONE - 150 is simple to utilize and can be used to process a variety of materials including Si, Ta, Al, and Ni. Various processes can be run concurrently, such as deposition, oxidation, sputtering, and chemical etching. Advanced processes such as capacitively coupled plasma (CCP) and inductively coupled plasma (ICP) are also possible. The machine has a programmable logic controller (PLC) that allows for simple process control and monitoring. It is also equipped with a wide spectrum of advanced data acquisition tools, including optical microscopy, FTIR spectrometry, and residual gas analysis (RGA). These tools assist in monitoring and verifying the process conditions. CONCEPT ONE 150 is a powerful and reliable tool for ensuring high quality and repeatability of process performance. With its wide range of process options and integrated monitoring tools, the tool is ideal for mass production of integrated circuits and other microelectronic devices.