Used NOVELLUS Concept One-W #293690378 for sale

NOVELLUS Concept One-W is a revolutionary reactor technology developed by the semiconductor equipment manufacturer NOVELLUS Systems, Inc. This reactor combines chemical vapor deposition (CVD) and physical vapor deposition (PVD) into a single, cost-effective equipment. It is designed to provide rapid cycle time, temperature stability, and uniformity for semiconductor wafer fabrication processes. NOVELLUS CONCEPT ONE W utilizes a single chamber CVD system with two electrodes to produce a wide range of wafer-processing capabilities. The single chamber enables the flexibility to select wafer size of up to eight inches, dielectric, metal, and film deposition options, and several single-wafer processes. The dual electrodes enable superior process uniformity and temperature stability across the entire surface of the wafer. Concept One-W's CVD unit uses fluorine-based chemistries which are designed to enable improved film thickness, surface quality, and adhesion properties. The reactor also features a low-temperature processing capability, which helps to reduce costs associated with thermal-cycling and enables the deposition of thinner films at lower cost than traditional PVD systems. In addition, CONCEPT ONE W integrates two chambers to allow simultaneous deposition of wet and dry processes. This process dramatically shortens the cycle time for film deposition, which leads to higher production throughput. The reduced cycle time also increases production reliability and yields of up to 90 percent. The machine is equipped with electronic monitoring and temperature-control abilities, to ensure repeatable results with every batch NOVELLUS Concept One-W reactor is engineered with precision and reliability in mind. It is designed for maximum efficiency of operation in fabrication facilities, helping to reduce overall cost per unit and improve production time. The reactor is ideally suited for a wide variety of semiconductor operations, including DRAM, SRAM, logic, memory, and other semiconductor device production.