Used NOVELLUS CONCEPT One #73827 for sale
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ID: 73827
PECVD system, 5"
Main body
Booster pump
Reacor dry pump
LL pump
Scrubber
Generator
Power requirements
De-installed
1994 vintage.
NOVELLUS CONCEPT One is a high productivity, wafer-processing reactor designed for the advanced microelectronics market. It is one of the highest performing, most reliable and flexible reactors in its class and has the ability to deliver customizable process concentrations and temperatures. It is equipped with a patented NOVELLUS Drive Equipment, patented NOVELLUS Atomization System and NOVELLUS Controlled Cooling unit, making it the ideal choice for manufacturers who require high performance and cost-effective wafer processing. NOVELLUS Drive Machine (NDS) is an advanced technology that is capable of delivering precise, stable and repeatable process conditions for maximum productivity and product quality. It utilizes an innovative motor, motor-driven shaft and digital encoders that track the motion of the shaft with high accuracy. This provides the high levels of control required for optimal process energetic and attains a 45 percent improvement in process stability over conventional reactors. NOVELLUS Atomization Tool (NAS) combines high-efficiency atomization with precise process control. Allowing users to control the energy efficiency, process temperature and concentration, NAS is designed to provide a custom-tailored process to meet specific needs. NOVELLUS Controlled Cooling (NCC) asset is designed to help reduce costs associated with cooling and to preserve product quality by evenly cooling the wafer to a safe temperature before the process is stopped. It uses an advanced linear drive motor to precisely adjust the process temperature, increase cooling rate, reduce thermal-gradient stresses, and create uniform temperatures throughout the wafer. NOVELLUS CONCEPT ONE reactor is an efficient and reliable choice for manufacturers looking to gain an edge in the microelectronics industry. It is designed to be a one-stop solution that delivers outstanding performance and precise, predictable process control. It's versatility, durability and precision make it the ideal choice for cutting edge, high performance processes.
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