Used NOVELLUS CONCEPT One #9026266 for sale

NOVELLUS CONCEPT One is a next generation reactor designed to be scalable and tailored to the unique needs of a growing semiconductor industry. It is a Cold Wall EUV source that enables the precise fabrication of components used in modern semiconductor device manufacturing. It is capable of producing power densities ranging from 150-400 mW/cm2 over a wide area of 1m x 1m with an average coherence length over this area of 40 cm. This power density is capable of driving high-efficiency EUV systems down to 0.15nm resolution. NOVELLUS CONCEPT ONE reactor features an integrated gas injection equipment that works with an automated gas mixing technique which enables it to produce an improved laser output with heating of the laser cavity. This consistent heat profile improves focusing of the laser beam and allows for precise control of the process. It further ensures that the process is repeatable and stable resulting in higher yield and better process adder. CONCEPT One also features an active circulating cooler which keeps the laser, amplifying media and optics on the reactor at consistent temperatures. This thermal management system works with the in-situ diagnostics and feedback cooling systems to improve the output stability of the reactor, enabling fine tuning of the process parameters. CONCEPT ONE further features an in-situ diagnostics unit which allows for the measurement of temporal evolution in beam properties during the fabrication process cycle. This ensures accurate beam output and minimizes damage to the optics over time. Additionally, the reactor also features a high-efficiency EUV source, which creates a more efficient means of energy transfer from the laser to the optics and hence reducing power consumption. NOVELLUS CONCEPT One is an optimized EUV source reactor which is capable of driving the semiconductor industry to success. Its power and temperature control systems, together with its in-situ diagnostics and integrated gas injection machine make it a reliable and robust product that is highly efficient and suited to the challenging needs of the semiconductor industry.