Used NOVELLUS CONCEPT One #9148238 for sale

NOVELLUS CONCEPT One reactor is a revolutionary new device made to enhance semiconductor production. It is a Physical Vapor Deposition (PVD) reactor that provides increased control and a significantly higher process accuracy compared to traditional systems. The reactor's multiple chamber design features a chamber main body, a rotary substrate heater, and a heated lid, ensuring consistent temperatures throughout the entire reaction. NOVELLUS CONCEPT ONE reactor's main body features an integrated wafer handling system consisting of a slot-in platen and a loader/unloader to ensure fast and accurate loading and unloading of the wafers. It also enables positional control of the platen to ensure exact deposition process. The rotary substrate heater is designed to limit the thermal shock to the wafers, resulting in higher process repeatability and better control of the deposition process. The heated lid provides four independent temperature zones across the thermal length of the chamber. With this feature, each zone can be independently operated for process flexibility and the capability to accurately manage the heating of the wafers. The heated lid also significantly reduces the thermal mass of the chamber's interior, resulting in a fast and even internal temperature rise. CONCEPT One reactor is designed to provide direct temperature measurement and control of the platen and substrate associated temperatures. This helps ensure a more accurate and repeatable deposition process. This advanced control system also enables a wide range of control parameters such as chamber pressure, sputtering current, RF power and RF matching. This ensures a high degree of process repeatability and reliability. CONCEPT ONE reactor is an extremely advanced PVD system that provides unprecedented process control and accuracy. With its multiple chamber design, independent temperature zones, direct temperature measurement, and a wide range of control parameters, NOVELLUS CONCEPT One reactor is a no-brainer for anyone looking to significantly enhance the efficiency of their production line.