Used NOVELLUS CONCEPT One #9193243 for sale

NOVELLUS CONCEPT One is an advanced plasma-based reactor that provides high-precision processing for the semiconductor industry. The reactor utilizes a unique combination of magnetically-confined argon plasma and free-electron laser optics to create a highly efficient and cost-effective manufacturing process for creating semiconductor devices. This state-of-the-art reactor was developed by NOVELLUS Systems, Inc., a leading provider of high-tech solutions for semiconductor manufacturing. The Plasma Reaction Chamber (PRC) is the heart of NOVELLUS CONCEPT ONE reactor. This chamber is composed of several components including the optical window, the power window, and the chamber walls. The PRC utilizes a unique combination of argon plasma and free electron laser optics to provide precision control and to ensure repeatable accuracy during processing. The argon plasma is held in place by the magnetic field that is generated by the solenoid external to the chamber. When the plasma is energized, it acts as a gas mode sputtering source of either reactive species or neutrals allowing for greater control and process flexibility. The optics package produces a diffractively localized energy spectral shape to increase process selectivity off-axis and center-axis. CONCEPT One also features an advanced high power RF drive equipment to provide optimal plasma control. This drive system matches the plasma frequency exactly and produces large-scale pulsed magnetic fields to avoid arcing and create a desired plasma shape. The advanced control unit featured in this reactor ensures a reliable and repeatable process with precision control. The machine is designed to compensate for parametric changes such as varying backgrounds or fouling of components. CONCEPT ONE is compatible with industry standard materials and configurations for semiconductor processing. With its unique combination of RF drive systems, optics, and plasma production, this reactor can handle a variety of substrates and semiconductor materials with exceptional accuracy and precision. The design of NOVELLUS CONCEPT One has been optimized for high-yield production of the highest quality semiconductor devices, cutting cycle times and costs for the manufacturers.