Used NOVELLUS CONCEPT One #9226321 for sale

NOVELLUS CONCEPT One reactor is a revolutionary new design in semiconductor fabrication equipment. It is a revolutionary one-step CVD (chemical vapor deposition) tool, combining the performance of a wet-etch chamber, deposition chamber, and substrate heater in a single compact equipment. NOVELLUS CONCEPT ONE reactor is designed to provide superior process temperature uniformity and a high degree of process control. CONCEPT One reactor uses a rotating chamber platform, driven by a motor, to uniformly coat the substrate with a reflective liquid distilled from the deposition source material. The warm substrate is then quickly and accurately heated using a high-efficiency gas-fired graphite heater, before the substrate enters the deposition chamber. Inside this chamber, the material is then deposited onto the substrate, with the temperature and gas flows precisely controlled and monitored. High speed interlocks and plasma dosing are also incorporated into the rotation cycle to optimize the process. CONCEPT ONE reactor also features an advanced X-Y scan system which has been optimized for maximum process uniformity and reproducibility. This unit allows the chamber platform to be accurately programmed to scan in any direction and the operator to quickly and conveniently control the process. The platform can also be used to track the substrate and process temperatures during deposition, allowing the process to be monitored and adjusted on the fly. NOVELLUS CONCEPT One reactor is designed to provide superior temperature uniformity and process stability, while allowing the operator greater flexibility and control. It is ideal for semiconductor fabrication as it can handle most deposition processes, including CVD, ALD, and PECVD. The design also enables reactor cleaning and maintenance to be performed quicker and more effectively, minimizing downtime and prolonging machine life. This reliable and well-performing design is trusted by many in the semiconductor industry and is available from NOVELLUS Systems.