Used NOVELLUS CONCEPT One #9243883 for sale

NOVELLUS CONCEPT One is a high-performance single wafer reactor that is powered by innovative technology and design. The reactor enables superior process flexibility, faster cycle times and improved utilization of expensive fab space. The reactor is comprised of a one-piece stationary chamber and a six-axis motion platform with a maximum reach of 10 inches. The chamber is built and designed to ensure there is no risk of particle contamination and is constructed with an electrostatic grounded PEEK wall. The reactor features an area of 6.5" pumped and isolated pumping zone, with integrated active ventilation. To offer superior process flexibility, NOVELLUS CONCEPT ONE is equipped with a high-speed tool change feature. It can be swapped with different configurations such as single-wafer and dual-wafer processing. Temperature uniformity is maintained by water cooled plates, which also ensure a low thermal mass environment. CONCEPT One is capable of executing up to 1000 recipes and all of them at variable, speed and accuracy. CONCEPT ONE is powered by a multi-axis motion platform and has robust, accurate, and reliable controls. Its powerful motion suite includes 10-axis high-speed motion models, along with low- and high-force inertial axis configurations. Each axis is capable of delivering up to 200 mm/s linear speed and 150°C/second rotation. This allows the equipment to perform multiple operations simultaneously, significantly reducing cycle times and boosting productivity. In addition, to maximize use of the expensive fab space, NOVELLUS CONCEPT One is designed as an integrated, enclosed system with all components contained and connected in one place. The control unit is designed to ensure the highest level of precision, accuracy, and automation. NOVELLUS CONCEPT ONE is the ideal machine for high-performance, flexible, and reliable processes. It offers superior process flexibility, faster cycle times and improved utilization of expensive fab space, while maintaining temperature uniformity and superior performance.