Used NOVELLUS CONCEPT One #9268771 for sale

NOVELLUS CONCEPT One
Manufacturer
NOVELLUS
Model
CONCEPT One
ID: 9268771
Wafer Size: 6"
CVD Systems, 6".
NOVELLUS CONCEPT One is an advanced tool for processing semiconductor wafers. It is designed for high productivity dielectric etch and deposition applications in the semiconductor industry. NOVELLUS CONCEPT ONE reactor is the perfect combination of performance, flexibility, and cost. It offers a reliable, cost-effective production of certified and fully compliant 300mm-wafer solutions. CONCEPT One reactor is a single-wafer process chamber, constructed from thermally and electrically conductive stainless steel. It is equipped with precision gas flow control and uniform plasma generation. It is engineered for extremely uniform auto-adjusting over the entire wafer surface, allowing the process to remain on target regardless of the number of die or across the wafer. The process chamber also provides excellent process repeatability and control of contaminants, including metals and particulates. The reactor also features Dynamic Gas Control, which allows it to adjust flowrates and temperatures independently, allowing optimal process conditions every time. This delivers excellent process uniformity, dose compliance, and cycle time reduction. CONCEPT ONE reactor also features automatic thermal and pressure control (ATPC), ensuring the chamber always maintains the correct process levels for the best possible results. It also offers a real-time monitoring and process control system (PMC), allowing better analysis of performance trends and process optimization. The reactor features various process recipes and tools to fit different needs in the semiconductor industry. It is also compatible with a number of industry-standard equipment and configurations, including platform automation, wafer transfer and loading/unloading systems, vacuum pumps, gas delivery systems and safety systems. Overall, NOVELLUS CONCEPT One reactor is a state-of-the-art tool for efficient processing of semiconductor wafers. It offers reliable and cost-effective performance with precise process control. Additionally, its process recipes and automation capabilities provide a high degree of flexibility and make it suitable for many different applications.
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