Used NOVELLUS CONCEPT One #9299444 for sale

Manufacturer
NOVELLUS
Model
CONCEPT One
ID: 9299444
Wafer Size: 6"
PECVD System, 6" TEOS.
NOVELLUS CONCEPT One is a next-generation high-performance reactor designed to provide advanced process capabilities for advanced semiconductor fabrication. NOVELLUS CONCEPT ONE reactor is engineered to provide high process yields and optimal productivity, with low thermal budget, low particle generation and uniformity. CONCEPT One reactor employs the latest advances in Micro-Electro Mechanical Structure (MEMS) technology, employing meso-scale vessels that are half the size of traditional reactors, enabling unprecedented levels of throughput and precision. CONCEPT ONE reactor is equipped with an integrated vacuum source and secondary processing chamber for advanced applications, allowing for a versatile range of process capabilities. It is capable of handling small batches and large wafers with high throughput control, as well as providing a variety of deposition techniques such as electron-beam evaporation, chemical-vapor deposition and sputter deposition. To meet the demand for high-precision thin-film coatings, NOVELLUS CONCEPT One reactor has a self-contained, multi-zone process module that enables the highest aspect ratio deposition. It is capable of depositing and etching thin films with nanometer-scale accuracy, and its gas and power flow systems can be easily configured to accommodate specific process requirements. NOVELLUS CONCEPT ONE reactor is designed to offer excellent uniformity and precision in process measurements. Its advanced measurement capabilities include the use of an advanced optics-based monitoring equipment, giving readings with an accuracy of up to 20 nanometers. The reactor also features an advanced optical metrology system and an integrated Fourier Transform Infrared Spectroscopy (FTIR) unit, providing complete analytical capabilities that can be used for process control and diagnostics. CONCEPT One reactor is also equipped with an integrated environmental management machine, allowing for safe and efficient operation in a variety of environments. The reactor's low-heat and low-power design can be configured to meet specific environmental requirements, and its integrated safety features provide an optimized tool for process safety. CONCEPT ONE reactor is an advanced, high-performance reactor capable of providing unprecedented process capabilities for the semiconductor fabrication market. Its integrated systems, advanced design features, and exceptional analytical capabilities make it the ideal tool for achieving optimum yields and productivity. With its cutting-edge technology, NOVELLUS CONCEPT One reactor is destined to revolutionize the industry.
There are no reviews yet