Used NOVELLUS CONCEPT One #9377870 for sale

NOVELLUS CONCEPT One Reactor is a revolutionary tool for the electronic deposition of thin films for integrated circuit fabrication. It uses a combination of rotating, thermal and chemical processes to precisely deposit thin films at high rates, resulting in increased productivity, enhanced uniformity, and improved film properties. The reactor is designed to enable thin-film deposition on a variety of materials, including those used for semiconductor fabrication and chemical-vapor deposition. The rotating disc of NOVELLUS CONCEPT ONE Reactor features a cylindrical, horizontally-oriented center with a diameter of up to 6 inches. Sapphire disks are mounted on the rotating center, allowing precise thin-film deposition. The reactor includes a heat source, either a resistive or induction system, to maintain precise temperatures over the entire thermal deposition range. The thermal system may be either dry or wet and is adjustable with precise heating or cooling. Additionally, a secondary source of heat may be used to achieve higher uniformity and higher deposition rates. The reactor also includes a chemical source, which may be a separate chemical source or a combo source that utilizes both the heat source and chemical source. The chemical source includes a chemical delivery system, allowing precise control of the chemical presence and allowing the delivery of the chemical mix onto all areas of the substrate. In addition, CONCEPT One Reactor also offers a number of features to enhance thin-film deposition. Depending on the substrate and the desired film, the reactor can be configured for chemical and thermal deposition, or for a combination of the two. Additionally, the reactor provides automated, accurate calibration and diagnostics to ensure precise deposition results. CONCEPT ONE Reactor is an excellent tool for the modern, high-speed deposition of thin-film materials. It provides precise temperature and chemical control, enabling a wide range of substrates to be processed with improved uniformity and increased productivity.