Used NOVELLUS Inova NExT #9283648 for sale

NOVELLUS Inova NExT is a state-of-the-art, advanced wafer-processing equipment designed for high yield and low cost of ownership. It features an innovative annular chamber design that enables high-performance deposition processes while reducing the total cost of ownership of the system. It is ideal for applications that require high-throughput and/or multiple combinations of deposition processes, or that have wafers that are larger than the standard size. Inova NExT consists of many advanced components, including the NEXt-Gen Annular Reactor, a high-temperature deposition tool with a patented annular gap. This design allows for uniform heating of the substrate and deposition of material through a wide range of process parameters and temperatures. The tool also features optimized film uniformity and higher deposition rate capabilities than standard tools. NOVELLUS Inova NExT also features an advanced temperature control unit and substrates cooling machine capable of maintaining a uniform temperature distribution in the process chamber and providing effective heat transfer between the wafer and deposition zone. This allows for quality control at each step of the process, ensuring uniform results. The tool also offers advanced automation functions such as integrated data management, remote access, and an advanced process control suite. The NEXt-Gen Annular Reactor utilizes a nitrogen-nitrogen mixture as the carrier gas, providing a safe, inert atmosphere that helps the tool achieve high-performance, precise deposition processes. The design also enables the asset to be easily scaled up for larger process variety and higher volume production. In addition to the NEXt-Gen Annular Reactor, Inova NExT also includes a tunable etch tool. This tool uses a patented RF signal and uniform process recipes to ensure precise etching, without requiring any manual adjustment of etch parameters. This allows for high-precision etch processes and reduces the risk of wafer damage. NOVELLUS Inova NExT is the ideal technology for today's wafer-processing needs, offering reliable performance, increased throughput, and cost savings. It is ideal for a variety of applications, including advanced packaging, dielectric deposition, 3D device production, microfabrication, and more.