Used NOVELLUS Inova XT #293757055 for sale
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ID: 293757055
Wafer Size: 12"
PVD System, 12"
Mainframe
EFEM
(6) Chambers
(4) AC Racks
(14) RF Racks
Power rack.
NOVELLUS Inova XT is a state-of-the-art reactor equipment suitable for a wide range of applications, including high-volume manufacturing and advanced process technologies. Inova XT combines superior thermal characteristics and long chamber lifetime with low vibration performance and flexible process control, giving customers the ability to maximize efficiency and yield. NOVELLUS Inova XT is made up of three main components: the pressure vessel, the plasma source, and the gas flow environment. The pressure vessel is composed of a stainless steel inner vessel, insulated with ceramic and quartz to protect the process chamber from external influences and to trap heat for efficient plasma stripping. The plasma source is an electron cyclotron resonance (ECR) microwave source which is designed to efficiently and rapidly heat the process chamber for optimal plasma production. The gas flow is managed by a complex chamber geometry and low-capacity gas valves which enable an optimal uniformity. Inova XT is equipped with advanced process control, including the ability to control multiple methods such as ECR (for process development and optimization), dry etch, and gas phase chemistry. The ECR chamber geometry and low-capacity gas valves contribute to superior uniformity for high-quality results. The system also allows for optional remote monitoring and, when mounted in a cleanroom, is designed with automated cleaning in mind. The unit is equipped with an intuitive user interface with a graphical display showing real-time process control and chamber diagnostics data which allows for easy process visualization. Additionally, NOVELLUS Inova XT has built-in process recipe library feature that enables automated process recipes and makes it easier for users to customize their production processes. Overall, Inova XT is a reliable and efficient reactor machine that is well-suited for high-volume production and advanced process technologies.
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