Used NOVELLUS Inova XT #9375328 for sale

NOVELLUS Inova XT Reactor is a next generation lithography tool designed to enable the fabrication of semiconductor microdevices. Inova XT is a highly automated, computer-controlled device capable of performing advanced etch processes in a fast, efficient and reliable manner. The equipment is designed to deliver a variety of processes to meet specific device and process requirements. The system consists of a supply module, loading module, RF generator and curing oven. The supply module houses the process gasses, acids and cleaning solutions needed for reactive ion etching. The loading module automatically loads and unloads substrates onto an electrostatic chuck, allowing for fast changes in substrate formats. The RF generator uses microwave frequency to supply reactive ions to etch and activate a variety of process chemistries. The curing oven is used to cure and dry photoresist and process chemistries. NOVELLUS Inova XT uses precise control over the etch process to deliver superior process efficiency. The unit has a wide range of etch processes available, from wet to dry etch processes, with a wide variety of chemistries and reactions supported. Processes such as oxygen, hydrogen, argon, ICP, ECR, CMP, quartz etch, and fluorine etch are all supported. The machine can be tailored to meet the needs of individual substrates and processes. In addition, Inova XT has built in safety features such as bellows isolation, chamber fan dynamics, minimized contact-to-substrate loads, gas safety board, and feedback processes. An automated monitor also tracks process runs and provides detailed process analysis. To ensure high yields and repeatability, NOVELLUS Inova XT employs a number of advanced features and capabilities. It incorporates a sensor interface module, auto-calibration, a microcontroller, and integrated interface. This integrated tool allows the reactor to quickly adjust to changes in the etching process, and provides an effective tool for optimizing process conditions across a range of substrates. Overall, Inova XT Reactor is a highly sophisticated, efficient and safe etching reactor capable of delivering precise and controllable etch processes. The automation and feedback mechanisms of NOVELLUS Inova XT allow for a rapid and repeatable etch process, and the integrated asset ensures high yields and repeatability.