Used NOVELLUS Inova #9188671 for sale

NOVELLUS Inova is a modular atomic layer deposition (ALD) reactor designed for precision optical coating applications such as AR/VR/MR displays, consumer electronics, optical communications and medical optics. Inova offers the unparalleled accuracy, repeatability and control (down to 0.01 micron) required for producing advanced optical systems. NOVELLUS Inova operates with two independent process zones and uses a heated linear motion transport (LMT) mechanism for superior substrate handling. The design allows for substrates to be processed simultaneously in both processes zones without interruption. Specialized process engineering ensures energy conservation and optimal use of materials, while also providing superior electrical isolation. Inova is powered by an optimized operating software to facilitate an easy and intuitive user experience. NOVELLUS Inova includes a touch-screen display and a custom-engineered GUI for essential process monitoring and precise control. System parameters, deposition processes (each to 0.01 micron), recipes and settings can be customized to meet individual user requirements. Inova incorporates a wide range of Advanced Precise Technologies (APT), such as the AIRESite System, which enables reliable defect-free multilayer thin films and coating, low-power co-deposition of high and ultra-thin films, and reactive element deposition (including ALD). It also offers adjustable process control settings for pressure, temperature, gas flow, plasma, light and more, enabling process optimization. NOVELLUS Inova is hermetically sealed to reduce contamination risk and ensure optimal coating accuracy. It also includes a powerful scattering module (or targeted irradiation module) enabling high-quality coatings on a greater range of evanescent and high-permeability optical components. Inova is engineered for ease of installation and can be customized to suit a variety of laboratory and production environments. Optional deposition chamber accessories include an enclosed sample elevator, rotatable boat, and vacuum supply unit, all of which are capable of being easily installed, configured and used in the laboratory setting. In addition, NOVELLUS Inova supports NOVELLUS Service Toolkit, a powerful suite of engineering and support tools that enable users to efficiently monitor, debug and maintain the system. Moreover, when needed, NOVELLUS experts can analyze and optimize processes through remote diagnostics. Inova is the ideal solution for those seeking an advanced, secure and cost-effective solution for precision optical film production.