Used NOVELLUS Inova #9390623 for sale

NOVELLUS Inova reactor is the latest advanced reactor platform designed to enable the deposition of ultra fine- grained films. It employs a unique, integrated closed loop process control equipment, powered by NOVELLUS ALETA software, that allows for precise control over the entire deposition process. This cutting-edge system enables the user to precisely define film parameters including deposition rate, area uniformity, and film stress in order to optimize the performance of the substrate. Inova reactor utilizes a cold-cathode torch to generate a reactive ion plasma, along with a high frequency radio frequency source to deliver a uniform ionized gas, and an advanced high performance electron impact source to create a free-flow of ions. The integrated magnet-holder enables users to produce more consistent and repeatable processes when compared to electrostatic processes alone. The integrated active gas delivery unit is capable of precisely controlling the flow and composition of the gas, allowing for enhanced film uniformity and repeatability. NOVELLUS Inova reactor also features a unique pressure-control module which provides increased temperature stability and uniformity, leading to improved film quality. In addition to the advanced process control capabilities, Inova reactor also features several innovative safety protocols. With integrated Anti-Explosive Sensor, users are protected from explosive atmospheres within the chamber. An auto-shutoff machine prevents high-pressure sparks that can lead to potential damage to the chamber. Enhanced chamber protection features include improved heat flow management and power control, providing greater thermal stability and cooling. NOVELLUS Inova reactor is an advanced platform designed to meet the needs of the most demanding deposition processes. By providing advanced process control, improved safety protocols, and optimal thermal stability, Inova reactor enables users to achieve superior results compared to previous reactor platforms. With NOVELLUS Inova reactor, users can achieve their desired results in shorter process times, higher throughput rates, and improved film quality.