Used NOVELLUS Inova #9390633 for sale

NOVELLUS Inova is a chemical vapor deposition (CVD) reactor, an equipment used mainly in semiconductor fabrication processes. It offers superior process uniformity, excellent thermal stability, and high throughput rates in small geometries. It is specifically designed to enable the processing of increasingly complex nano-scale integrated circuit designs. Inova reactor beam consists of a wafer mounting plate, an RF torch, a torch antenna, and a gas flow manifold. The wafer mounting plate helps in mounting the wafer to the reactor chamber, aiding in supplying the electrical power connections and the necessary gases. The RF torch heats the wafer, creates a plasma for the deposition process, and injects the reactant gases from the gas flow manifold into the chamber. The torch antenna shoots the high-frequency radio-waves to initiate and sustain a plasma field for the deposition process. The gas flow manifold collects the reaction gases from the source and diverts them to the reaction chamber. NOVELLUS Inova's unique design allows for high deposition rates and excellent process uniformity. The high deposition rates and improved uniformity simply means that high-quality devices can be produced with fewer process steps and a higher productivity. With two major breakthrough forms of deposition—plasma density control and plasma pulse frequency-modulation—Inova is capable of depositing higher-quality films than conventional methods and at higher process temperatures. It also incorporated high-end electronics, including distributed process control technology, that allows wafers to be processed faster and with better accuracy. Moreover, its closed-loop controller makes real-time calibration and control of the deposition process possible, further ensuring that all layers produced by the CVD are accurately formed and that the process remains consistent. NOVELLUS Inova reactor system has a number of advantages, such as improved quality of products and reduced cycle times, making it an attractive solution for device manufacturers. Inova is an efficient and reliable processing system, and has been helping to pave the way for tomorrow's semiconductor industry.