Used NOVELLUS Sabre XT #293604340 for sale

Manufacturer
NOVELLUS
Model
Sabre XT
ID: 293604340
Electro copper plating system.
NOVELLUS Sabre XT is a digital Single-wafer advanced reactor designed to meet state-of-the-art performance requirements in semiconductor manufacturing. It features NOVELLUS advanced PECVD (Plasma-Enhanced Chemical Vapor Deposition) technology to deliver compounds to the surface of a wafer at high speed and energy efficiency. The reactor is built from hardy, corrosion-resistant materials and features a self-contained design that simplifies maintenance and reduces the need for costly equipment modifications. Its powerful three-stage deposition system offers precise control over the deposition process that is capable of meeting tight, complex specifications. NOVELLUS SABREXT's unique, multifunction system architecture includes a high-capacity, high-powered RF generator that supports high-temperature processes. The generator has been optimized to ensure that the plasma density remains consistent across the surface of the wafer while minimizing RF interference. It also features a low-power substrate-temperature controller that responds quickly and effectively to process demand. Sabre XT's integrated design allows for maximum utilization of its extensive product portfolio, which includes specialized coatings, films, and advanced materials. Additionally, it offers improved coverage, uniformity, and selectivity, ensuring the best possible yield rate. SABREXT also provides efficient reactor cycle-time management, with enhanced process monitoring capabilities, ensuring consistent and repeatable results. For further efficiency gains, NOVELLUS Sabre XT's system includes automated cleaning capabilities, allowing for quick and easy conversion between ops, processes and recipes. These features put it among the most flexible and powerful semiconductor reactors available and make it well suited for use in advanced manufacturing environments. NOVELLUS SABREXT delivers consistently high performance, low cost of ownership and reduced cycle times, ideal for customers requiring high productivity and yield. What's more, its integrated design and features make this reactor reliable and worry-free, allowing for reliable, repeatable process results. Its flexible design provides for easy maintenance and upgrades as needed, ensuring that your semiconductor manufacturing process is always running at its optimal peak.
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