Used NOVELLUS Sabre XT #9028619 for sale

Name: NOVELLUS Sabre XT
Brand: NOVELLUS
SKU: 9028619
Availability: SoldOut

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

Tap to zoom

Sold

Reactors

Manufacturer

NOVELLUS

Model

Sabre XT

ID: 9028619

Electro Chemical Deposition (ECD) system, 12" Install Type: Stand-Alone SEMI S2-93A & CE Marking Compliance Cassette Interface: (2) 300mm 25-slot FOUP Load-Ports Auto Wafer/Cassette Mapping Wafer Center Find 4-Axis Wafer Handling Robot (ATM) with vacuum pick Mini-Environment (Class 1 HEPA), Hunt Air System Main Unit: SS Backbone & Enclosure Polyester Powder Coat Paint Finish Cover Panels Status Lamp (R/Y/G/B) – FI Mounted Front-side User Interface (UI) 2.0mm plating edge exclusion (requires full coverage barrier/seed) Bath Control Module: Metering of (3) bath additives DI & fresh plating solution Bath Chemistry control algorithm (Smart Dose), corrects for additive decomposition Central bath reservoir for plating modules 2nd Containment (Splash Guards & Leak Detection) (3) Plating modules: Copper Anodes (4N) Field Shaping Elements Anode Chambers & Membranes Plating Cells (minimize copper effluent) Pulse Plating Power Supply Flat Thickness distribution profile kit 0.05um Final Filters Dual Waste Stream Plumbing: Dedicated plating solution reclaim Dilute rinse water waste stream Pentium Computer/Controller Chase Computer GUI-Based controlling software SECS/GEM SW – Proteus Active Top Hat Options: Bevel Etch for all (3) SRDs: On-board Chemical Dilution/Mix unit (200mm ver) CMS Readiness Kit Manuals (Std & CR versions) may be avail. with tool at time of sale Customer Engineering Specials (CESs): CES PTC 40269A – 75’ Heater/Chiller Cables CES PTC 40228A – ½ Height EMO CES PTC 40230A – Light Tower Label CES PTC 40231A – DI Shut Off CES PTC 40234A – Door with Rounded Corner CES PTC 40237A – LOTO Label CES PTC 40250A – SRDX Container Cover CES PTC 40248A – Label Power Box CES PTC 40224B – Hermos Lot ID CES PTC 40292A – Dosing Door CES PTC 40291A – Power Box Captive Screws CES PTC 40290A – Neslab Main TB Removal CES PTC 40289A – SRD Controller Ground Wire CES PTC TBD - SAC CES PTC 40311A – FM 4910 Material ( 4 Items ) CES PTC 40312A – FM 4910 Material Tertiary Containment Tray CES PTC 40311B – FM 4910 Windows CES PTC 40320A – FM 4910 Panels CES PTC TBD - FM 4910 ( Internal ) Cost Estimate Supporting Equipment: (1) Neslab Heat Exchanger/Chiller Neslab Cable Kit (35ft) Chemicals / Gases used with tool: ENTHONE VIAFORM MAKEUP LA CUBATH VIAFORM SUPPRESSOR, ACCELERATOR, LEVELER COPPER (GENERIC) SILVER NITRATE SOLUTION (0.01N-0.3N) SODIUM HYDROXIDE, 1 N REAGENT QUALICHEM CU, CU REAGENT 2 SULFURIC ACID 98% VLSI GRADE HYDROGEN PEROXIDE 30% UHP Facility Connections: Drain: Bottom fed Exhaust: Top fed Facility Requirements: CDA Water (Chilled Tap & DI) Vacuum Power: 208VAC, 120A, 3-Phase, Freq 60Hz 2003 vintage.

Read More Close

NOVELLUS Sabre XT is a next-generation, highly integrated, high-performance reactive ion etch (RIE) tool designed to meet the demands of semiconductor device manufacturing. NOVELLUS SABREXT features NOVELLUS patented fast-etched, fast-processing technology to enable precision etching in both single- and double-metal layer applications. Sabre XT features a modular chamber design with a large etch chamber and a compact base section. With a total footprint area of less than three square meters, SABREXT is ideal for high volume production environments and enables efficient transfer of wafers from one chamber to the next. The compact design also allows for wafer filling and loading in the same chamber. At the heart of NOVELLUS Sabre XT is NOVELLUS AP-1000, a patented, high-density, advanced plasma source. The AP-1000 utilizes a unique gas-distribution system to provide excellent etch uniformity at high etch rates. In addition, the AP-1000 is designed to be used with a wide range of gases, resulting in high-quality etching for a variety of materials. NOVELLUS SABREXT also features NOVELLUS patented fast Etch Processor (FEP). This chamber-integrated system allows Sabre XT to automatically control the gas mix according to parameter settings so precise process control is maintained at all times. The FEP also compensates for any fluctuations in gas pressure or flow and quickly adjusts the process parameters per recipe. SABREXT is also equipped with NOVELLUS SmartXtend interface, which makes it easier than ever to control NOVELLUS Sabre XT and monitor its operation. The SmartXtend interface features an intuitive touchscreen and graphical user interface that provides simplified operation and precise recipe parameter tuning. In summary, NOVELLUS SABREXT is a powerful and highly efficient advanced reactive ion etch tool that is ideal for high-volume production. Its small footprint, integrated chamber design, and advanced plasma source and FEP processor make Sabre XT a perfect choice for any demanding device manufacturing environment.