Used NOVELLUS Sabre XT #9104570 for sale
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ID: 9104570
Cu Plating system
(2) Computers
HDD
CDS (Chemical delivery system): ATMI
Missing parts:
Chemical circulation pump
DC Power supply
CMS Unit
Chiller
Lifter controller
ATMI MCS P/N: 10-6016-00
(2) ATMI MDS P/N :10-5030-00
BDI: No
ECI QLC-7000
NESLAB HX-75A
BROOKS Aqua Tran TM 7
2003 vintage.
NOVELLUS Sabre XT, designed and manufactured by Lam Research Corporation, is a next-generation atomic layer deposition (ALD) reactor. NOVELLUS SABREXT is a revolutionary concept in wafer fabrication, allowing for the deposition of thin film coatings in extremely precise and uniform layers. ALD is used in high-precision industries such as semiconductor and high-end optics, and Sabre XT is optimized for those purposes. SABREXT's core architecture is based on a plasma-enhanced ALD (PEALD) design, which enables it to handle unique challenges in today's advanced fabrication environments. The reactor is equipped with a range of process capabilities such as multi-step temperature control, high deposition rates, and chemical precursor delivery. It can also handle standard process demands such as thermal and ultraviolet annealing, spin coating, and solvent annealing. NOVELLUS Sabre XT is designed to provide accurate and repeatable deposition results. Its precision-controlled plasma source ranges from 500 to 5,000 watts, and its distributed temperature control system enables precise temperature uniformity between wafers. Moreover, its high-precision nozzle enables precise control of the chemical precursor delivery. When it comes to the bottom line, NOVELLUS SABREXT also offers greatly reduced process cycle times and reduced scrap, with no compromise on quality. Its flexible design and high processing speeds allow for shorter product-to-market times. Its advanced process control systems enable better yield and lower material costs, and its automated monitoring systems reduce manual intervention during fabrication. In conclusion, Sabre XT ALD reactor offers significant advantages to the semiconductor and optics industries, with its full suite of advanced features and capabilities. It provides precision and accuracy like no other ALD system on the market today, enabling shorter product-to-market times and reduced scrap, with no compromise on quality.
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