Used NOVELLUS Sabre XT #9146195 for sale

NOVELLUS Sabre XT is a single-wafer, multi-reactor equipment designed to meet the intensifying needs of the ultra-large-scale device manufacturing industry. With IGBT, MOSFET, GaN, or other devices, NOVELLUS SABREXT has the capability of delivering optimal performance across a wide range of wafer sizes, in a variety of process up to and including the latest 3DIC advanced packaging. Sabre XT boasts a patented multi-reactor design, which allows for multiple deposition, etch, and implant processes to be carried out in a single tool. The innovative reactor design allows for parallel processing of wafers without cross-contamination, and simultaneous operation of multiple processing tools. In addition to providing higher throughput on a single wafer, SABREXT can handle multiple wafers within a single recipe. This hybrid manufacturing approach allows for batch-like production with the flexibility of single-wafer performance. NOVELLUS Sabre XT has an advanced multi-zone vacuum system which allows for a controlled environment in all areas of the chamber, including temperature and pressure control. This feature is designed to optimize the processing rate, with multiple vacuum regions to achieve reduced contamination and minimize the amount of time required for pumpdown operations. NOVELLUS SABREXT is also equipped with advanced monitoring systems, including software tools that monitor all aspects of the process including gas pressure, wafer temperature, chamber pressure, and more. The monitoring allows for a quick and accurate assessment of the condition of the reactor before and during processing. Finally, Sabre XT is designed to provide an ideal platform for advanced deposition levels including HDP, CVD, ALD, PECVD, and more. With its multi-reactor configuration, SABREXT is capable of handling the most demanding deposition needs, and consistently delivering exceptional uniformity and repeatability. In conclusion, NOVELLUS Sabre XT is designed to meet the needs of the ultra-large-scale device manufacturing industry. With its patented multi-reactor design, advanced multi-zone vacuum unit, and advanced monitoring systems, NOVELLUS SABREXT is capable of providing a comprehensive solution for a wide range of applications. For those manufacturers in need of a high-performance, multi-reactor deposition machine, Sabre XT is the ideal solution.