Used NOVELLUS Sabre XT #9183435 for sale

NOVELLUS Sabre XT Reactor is a robust, high performance reactor for chemical vapor deposition (CVD) applications. It is ideally suited for advanced wafer fabrication which includes enhanced device geometries and demanding metal deposition requirements. NOVELLUS SABREXT Reactor is a highly productive dual-zone, hot-wall CVD system with electron cyclotron resonance (ECR) plasma source technology. This technology produces a very uniform plasma distribution to ensure uniform layers and advanced dopant profiles independent of substrate size. Sabre XT reactor guarantees rapid growth rates and enables fast process set-up times. SABREXT reactor is engineered to meet the most demanding process requirements, having been designed for exceptional process control and repeatability. It boasts advanced process control techniques such as dual zone pressure control, recipe-based steering, and spectroscopic in-situ characterization enabling the most accurate and efficient process control. NOVELLUS Sabre XT reactor offers superior wafer uniformity for advanced device dimensional tolerance, and excellent oxide quality by enabling process optimization beyond the limits of conventional reactor designs. It provides exceptional control of layer thickness, smoothness and composition uniformity without compromising throughput. In addition, NOVELLUS SABREXT offers flexible dual end-point doping with advanced, integrated RF sources, and highly reliable faster thermal and optical wafer temperature measurements with tight control. All of these features make Sabre XT reactor an excellent fit for high-volume manufacturing of the most advanced applications such as magnetic random-access memory (MRAM), dynamic random-access memory (DRAM), and non-volatile memory (NVM). SABREXT reactor is therefore an ideal choice for high-yield, high-quality CVD processes thanks to its cutting-edge features. Its superior process repeatability, improved uniformity and accuracy of wafer processing all make NOVELLUS Sabre XT a highly reliable and cost-effective solution for challenging prototyping projects.