Used NOVELLUS Sabre #9285084 for sale

NOVELLUS Sabre is a state-of-the-art, high-performance reactor designed for advanced etch and deposition applications. It is capable of delivering superior process uniformity, repeatability, yield, and productivity thanks to its innovative process design, advanced materials, and intelligent automation. The equipment is based on a hydrogen and argon-based inductively coupled plasma (ICP) source, which provides a homogenous and unconstrained plasma source for maximum production throughput. The ICP source is combined with a dynamically configured in-situ plasma reflectometer (ISPR), which obtains accurate and instantaneous plasma readings, enabling accurate real-time monitoring and feedback of etch and deposition processes. The innovative process design of Sabre also allows up to six process modules to be programmed into the reactor simultaneously, each with its own set of parameters. This makes it possible to optimize multiple process steps with one machine, as opposed to utilizing multiple process systems within a single process chamber. NOVELLUS Sabre also features a flexible chamber architecture, allowing it to be customized for a wide range of etch and deposition applications. The versatile chamber design uses different numerical aperture optics, waveguide carriers, and process shutters to achieve high deposition rates and low particle generation. The system also features a modular process control unit, allowing users to easily modify and upgrade their reactor machine without any major tool overhauls. Additionally, users are able to take advantage of its advanced diagnostics suite and predictive maintenance asset, providing insight into model performance and maximizing uptime. Finally, the advanced automation capabilities of Sabre enable users to program repeatable processes for high-volume throughput. By utilizing complex algorithms, the equipment can design and optimize each process recipe for higher yields and production throughput, while reducing costs and energy consumption. All in all, NOVELLUS Sabre is an advanced reactor system that can be tailored to fulfill the needs of any etch and deposition application. With its high performance plasma source, process flexibility, and automation features, Sabre is truly a state-of-the-art unit, perfect for high-volume, high-yield production applications.