Used NOVELLUS Speed #9272639 for sale

NOVELLUS Speed is a high-Speed chemical vapor deposition (CVD) reactor specifically designed for semiconductor device fabrication. Its innovative design enables rapid multi-step depositions with extended process windows. This provides the flexibility for users to apply a wide variety of materials and process technologies to build complex integrated circuits. NOVELLUS Speed reactor is designed to take advantage of the latest advances in CVD technology to provide a highly efficient and reliable deposition process. It contains a single stage, high-Speed magnetron enhanced plasma source. This source utilizes variable frequency and high peak power together with RF matching capabilities to assure a controlled coating process. NOVELLUS Speed reactor is capable of depositing both high concentrations and low concentrations of materials at Speed while providing uniformity throughout the entire wafer surface. To improve deposition uniformity, NOVELLUS Speed reactor is equipped with a double-stage substrate heater. This heater works in tandem with the magnetron to maintain a uniform temperature throughout the reactor chamber. The first stage heater warms the substrate up to the needed deposition temperature, while the second stage heater is used to adjust the temperature as needed. To improve process stability, Speed reactor is equipped with a unique multi-zone process control system. This system automatically adjusts the levels of reactants and other process parameters as needed, to optimize the process in a manner that was never possible before. The combination of the multi-zone process control system along with advanced diagnostics enables adjustments to be made on the fly without interrupting the processing. NOVELLUS Speed reactor also includes advanced reactant delivery systems that enable high-rate deposition of a wide range of materials at controlled concentrations. These delivery systems are designed to provide exact reactant concentrations quickly and in a manner that is repeatable in a reproducible manner. In addition, the delivery systems are equipped with automated sequenced reactant delivery which allows for multi-step processes in a single tool. Speed reactor is the perfect tool for semiconductor device fabrication. It offers NOVELLUS Speed and flexibly needed to rapidly build extremely complex integrated circuits, with exceptional repeatability and uniformity. With its innovative design and advanced technology, Speed reactor is the best choice for those looking for a reliable and efficient CVD deposition process.