Used NOVELLUS SYSTEM CONCEPT 2 INOVA #9032880 for sale

NOVELLUS Equipment CONCEPT 2 INOVA is a highly advanced, innovative parallel-process deposition system featuring advanced process technology to deliver high rates and excellent conformality on a wide variety of different wafer types. The unit provides superior process capability, quality, and repeatability, utilizing three parallel, independent and integrated finite processing chambers housed in a single platform. CONCEPT 2 INOVA utilizes the latest developments in physical vapor deposition (PVD), Chemical Vapor Deposition (CVD), and Low Pressure Chemical Vapor Deposition (LPCVD) processes. Each one of the three chambers acts independently of the other chambers while still contributing in tandem to the overall reactor performance. Each chamber is equipped with its own microwave source, allowing for independent and optimized layers to be deposited on each wafer. NOVELLUS Machine CONCEPT 2 INOVA offers significant improvements in control technologies, allowing for precision control of the deposition environment. The tool has been designed with the most advanced automation capabilities, providing users with full integration and automation. The automated machine operation increases throughput and reduces costs, while providing the reliable and repeatable process results that are expected. CONCEPT 2 INOVA utilizes several advanced technologies to increase both efficiency and throughput. These technologies include a highly efficient Dual Pre-Chamber Configuration which allows for an optimized flow of gas. The Magnetic Shutter Technology offers precise control of the gas clouds and enables accurate gas beam control for high-resolution surfaces. NOVELLUS Asset CONCEPT 2 INOVA also has a high accuracy Arc Jet Chamber which allows for precisely controlled deposition of high-resolution structures. CONCEPT 2 INOVA is a multi-functional process platform that is capable of concurrent processes such as oxide, nitride, metals, and CMP processes. It also offers a variety of deposition options such as sub-ATM, ultra-low-pressure, and high-pressure operational modes. The model has the flexibility to be configured to any specific customer or application requirements. In addition to offering superior process and integration capabilities, NOVELLUS Equipment CONCEPT 2 INOVA offers an extensive suite of diagnostic tools to give operators a comprehensive overview of the process. Built-in monitoring of all operations and parameters provides operators with the ability to detect fluctuations and anomalies in the process earlier than ever before. Moreover, the built-in process control system ensures repeatable process results, as well as accuracy and stability of machining results. CONCEPT 2 INOVA offers a complete package of features making it an ideal solution for any modern advanced process manufacturing environment. With its robust and reliable performance, NOVELLUS Unit CONCEPT 2 INOVA provides an affordable, versatile, and reliable solution to meet the demands of any modern deposition process.