Used OERLIKON LEYBOLD Univex 350 #9409490 for sale
URL successfully copied!
Tap to zoom
OERLIKON LEYBOLD Univex 350 is a vertical-axis reactor designed for surface deposition on substrates and thin film deposition. Univex 350 is a diffusion batch-type reactor specifically designed for physical vapor deposition (PVD) process steps, such as evaporation, sputter deposition, and other techniques. The reactor has a cylindrical open pocket system allowing for rapid substrate exchange and flexible geometry. This allows it to be adapted to difficult geometries such as stacked substrates, narrow slit or small substrate pieces. The reactor consists of a stainless steel chamber, a crucible in the middle used for evaporation sources, two quartz windows for pressure measurements, and two ports for pumping, loading, unloading and gas input. The chamber is controlled by two independent PID controllers connected to a programmable logic controller (PLC). The components of OERLIKON LEYBOLD Univex 350 are programmable, with temperature, pressure and other process control feedbacks available from the PLC. It also has an automatic throttle valve that allows the vacuum to be maintained steadily during the process. In addition, Univex 350 includes integrated checking and safety systems for potential problems such as strong contamination, mechanical damage or gas leaks. These safety systems ensure that the reactor can be operated automatically as well as manually. Furthermore, its self-diagnosis program allows the user to check valve operations and monitor system parameters. OERLIKON LEYBOLD Univex 350 is a reliable reactor, allowing easy and fast deposition of thin films of various materials. Its efficient design and operational flexibility back up its performance, making it ideal for industrial and research use.
There are no reviews yet