Used ROTH & RAU MAiA #293752398 for sale
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ID: 293752398
Vintage: 2014
PECVD System
BUSCH Pumps
HAMLET Valves
FESTO Pneumatics
VAT Vacuum valves
SMC Digital flow switches
BECKHOFF PLCs
PHOENIX Power supply units
SICK Sensors
MKS Pressure switches
EATON Contactors, switches and relays
BRONKHORST Mass flow meters
LENZE Electric motors
ELERO Linear actuators
HERAEUS Infrared heaters
MUEGGE Magnetron heads
MUEGGE Microwave power supplies
HAPRO Side channel blowers
(4) COBRA BC 1000 F Pumps
(3) COBRA BC 2000 F Pumps
Coatings and dusts consist of the following substances:
Amorphous silicon nitride, SiNx, coherent layers and dust
Amorphous silicon, dust
Amorphous silicon dioxide, SiOx, continuous layers and dust
Amorphous aluminum oxide, AlOx, continuous layers and dust
2014 vintage.
ROTH & RAU MAiA reactor is a cutting-edge physical vapor deposition (PVD) system that is designed for a wide range of applications in the semiconductor, optoelectronics, and photovoltaic industries. This reactor features advanced technological capabilities and a highly efficient design that enables precise film deposition and excellent film quality. At the core of MAiA reactor is its high-vacuum chamber, which provides a clean and controlled environment for thin film deposition. The reactor is equipped with multiple high-precision process stations that allow for simultaneous deposition of multiple layers, making it suitable for complex multilayer structures required in modern semiconductor devices and solar cell manufacturing. One of the key features of ROTH & RAU MAiA reactor is its versatile substrate handling system, which can accommodate various substrate sizes and types, including silicon wafers, glass substrates, and flexible substrates. This versatility makes the reactor suitable for a wide range of applications, from small-scale research and development projects to high-volume production processes. MAiA reactor utilizes a range of PVD techniques, including sputtering, evaporation, and ion beam deposition, to deposit thin films of various materials such as metals, oxides, and nitrides. These techniques allow for precise control over film thickness, composition, and uniformity, resulting in high-quality films with excellent electrical and optical properties. Furthermore, the reactor is equipped with advanced process control systems that enable real-time monitoring and adjustment of key process parameters, such as deposition rate, substrate temperature, and gas flow rates. This level of control ensures reproducibility and consistency in film deposition, leading to high process yields and low defect rates. In addition, ROTH & RAU MAiA reactor features a high-throughput design that enables rapid deposition of thin films, making it ideal for high-volume production environments. The reactor's modular architecture allows for easy customization and scalability, enabling users to expand their capabilities and accommodate future process requirements. Overall, MAiA reactor represents a state-of-the-art solution for thin film deposition in the semiconductor, optoelectronics, and photovoltaic industries. With its advanced technological capabilities, versatile design, and high-throughput performance, this reactor is well-suited for a wide range of applications that demand precision, quality, and efficiency in thin film deposition processes.
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