Used TEL / TOKYO ELECTRON Triase+ EX-II Ti/TiN #293638914 for sale

TEL Triase+ EX-II Ti/TiN is a reactor designed for industrial use. It is used to carry out chemical processes such as oxidation, reduction, etching, deposition and surface treatments. It features a 24″ plasma cathode chamber featuring an angled mirror configuration which allows for uniformity of deposition rates and thickness over a large area. The chamber has gas-tight ceramic-insulated walls with an optional ceramic lid for heat control and low evaporation rate. Its 6-way adjustable gas control valves can provide for a total of 25 process gases, with flow control for up to 32 gases. The dual independent RF generators with up to 500W of output ensure smooth, repeatable processes for uniformity of deposition and surface treatment. The Triase+ EX-II has advanced software control with preloaded process recipes, advanced diagnostic capabilities and visual monitoring. Its device monitor and support applications can provide process stability and substrate quality management. The data acquisition equipment provides real-time process information and data logging capabilities. Additionally, the system features optional remote access and graphical user interface with recipe builder capabilities. The Triase+ EX-II is designed for operation in Class-1 cleanroom conditions, and ships with a certified gas management unit, safety interlocks and advanced safety features. It is designed to sustain the high temperatures needed for advanced processes and can be operated in inert environments up to 200°C and in high-pressure environments up to 5 Torr. Also, its automatic barrier chamber cleaning machine can perform multiple layer thickness depositions without risk of contamination. In summary, TOKYO ELECTRON Triase+ EX-II Ti/TiN is an industrial reactor designed to perform advanced chemical processes. It features multiple gas control systems, dual RF generators, advanced software control and optional remote access. It is designed to be used in Class-1 cleanrooms and is equipped with safety interlocks and advanced safety features to ensure safety and quality.