Used TEL / TOKYO ELECTRON Triase+ #293628645 for sale

TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON Triase+ is an advanced semiconductor-focused vertical furnace reactor produced by TEL / TOKYO ELECTRON, a leading manufacturer of process equipment. TEL Triase+ is a multi-purpose tool ideal for both low- and high-volume production that includes a number of enhancements over previous models of vertical furnace reactors. TOKYO ELECTRON Triase+ incorporates several unique technologies, such as an Improved Graphite Chamber Design and improved wafer temperature control through double-zone temperature control, to maximize temperature uniformity. The Improved Graphite Chamber Design increases gas flow and temperature uniformity across the wafer surface, providing increased yield in fewer cycles. The double-zone temperature control allows for independent control of both the upper and the lower chamber temperatures, resulting in improved overcoat uniformity and density. Triase+ also features TEL proprietary automated arm plate adjustment, allowing for automatic adjustment of the wafer height, reducing labor costs and increasing throughput. TEL / TOKYO ELECTRON Triase+'s Adaptive Process Control (APC) equipment provides accurate and consistent process control. With APC, users can set specific dual-chamber temperature profiles tailored to their recipe requirements. The system is capable of automatically making adjustments to the recipe to compensate for fluctuations in the process resulting from factors such as thermal lag or different wafer sizes. TEL Triase+ is designed for easy operation and offers a high degree of flexibility in terms of process applications. Through its integrated recipe editor, users can create and edit custom recipes for specific processes, resulting in a reduction of cycle times. TOKYO ELECTRON Triase+ also features increased safety features, such as an active cooling unit and an integrated furnace chamber exhaust machine, providing a more secure work environment. Overall, Triase+ is a valuable tool for semiconductor manufacturers. Its advanced technology and innovative feature make it an ideal choice for both low- and high-volume production processes. Its flexible process control and recipe editor, as well as increased safety features make it a valuable asset to any facility.