Used TEL / TOKYO ELECTRON Triase+ #9357066 for sale

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ID: 9357066
Wafer Size: 12"
Vintage: 2014
Metal CVD system, 12" (3) Load ports, 12" Loader module (3) Load lock modules with cooler Power Distribution Unit (PDU) PF S2-0200 Safety (2) Ti Process modules PCOT Ti Chamber Gas box RF Generation unit Trap interface HP-Ti Kit (2) TiN Process modules PCOT TiN Chamber Gas box Trap interface SFD Kit PF Accessory: Load port UI Fixing at LM right side EFEM and fan check monitor TM, LLM Leak check port manual valve transfer navigation system PF Outer cable Edge grip blade LM Fluorescent light TM RGA Port without valve (2) Ti PM Accessories: Ti Leak check port Ti PM Outer cable Ti Gas box: ClF3, H2, NH3 (2) TiN PM Accessories: TiN Leak check port TiN High coverage process kit TiN PM Outer cable Utility accessory: Utility interconnection gas female FDC Signal tower CVCF Rear step Cable tray 2014 vintage.
TEL / TOKYO ELECTRON Triase+ is a state-of-the-art reactor designed for the production of amorphous and micro-crystalline silicon thin film solar cells. The reactor provides a precise, controlled environment achieving industry best results. TEL Triase+ features a three-step, multi-stage thermal process which enables precise temperature control and a rapid, uniform heating that gives highly uniform and repeatable processes. The reactor also features a special beam-shaping optics equipment to ensure uniform irradiation of the reaction zone, and a multi-wavelength infrared heating system which ensures that the temperature of the substrate is homogeneous throughout the substrates. TOKYO ELECTRON Triase+ is equipped with a multiple source-feed gas unit which allows for the introduction of multiple gases simultaneously, allowing for more precise control over the reaction atmosphere and creating more uniform processes. It also features an active safety machine, designed to shutdown the reactor if an abnormal heating or cooling situation arises. The reactor also offers advanced process control automation capabilities, allowing recipes to be customized to the process requirements of the user. The tool also features an intuitive, user-friendly interface for easy operation and monitoring of the process parameters. The reaction chamber of Triase+ is designed to ensure optimal uniformity of the thin film produced. It features well-balanced flow rates, low pressure ranges, and optimized temperature distributions in the reaction chamber. TEL / TOKYO ELECTRON Triase+ offers added flexibility and reliability due to its unique design features. TEL Triase+ is an effective and efficient reactor, with high production rates, controllable conditions and uniform process results. Overall, TOKYO ELECTRON Triase+ reactor offers an incredibly precise and user-friendly asset to produce high quality, thin film solar cell materials. The reactor is built for maximum efficiency in a very small package, maintaining a high level of uniformity in the production process and reliable operation within the chosen process parameters.
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