Used TEL / TOKYO ELECTRON Triase+ #9357066 for sale
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ID: 9357066
Wafer Size: 12"
Vintage: 2014
Metal CVD system, 12"
(3) Load ports, 12"
Loader module
(3) Load lock modules with cooler
Power Distribution Unit (PDU)
PF S2-0200 Safety
(2) Ti Process modules
PCOT Ti Chamber
Gas box
RF Generation unit
Trap interface
HP-Ti Kit
(2) TiN Process modules
PCOT TiN Chamber
Gas box
Trap interface
SFD Kit
PF Accessory:
Load port
UI Fixing at LM right side
EFEM and fan check monitor
TM, LLM Leak check port manual valve transfer navigation system
PF Outer cable
Edge grip blade
LM Fluorescent light
TM RGA Port without valve
(2) Ti PM Accessories:
Ti Leak check port
Ti PM Outer cable
Ti Gas box: ClF3, H2, NH3
(2) TiN PM Accessories:
TiN Leak check port
TiN High coverage process kit
TiN PM Outer cable
Utility accessory:
Utility interconnection gas female
FDC
Signal tower
CVCF
Rear step
Cable tray
2014 vintage.
TEL / TOKYO ELECTRON Triase+ is a state-of-the-art reactor designed for the production of amorphous and micro-crystalline silicon thin film solar cells. The reactor provides a precise, controlled environment achieving industry best results. TEL Triase+ features a three-step, multi-stage thermal process which enables precise temperature control and a rapid, uniform heating that gives highly uniform and repeatable processes. The reactor also features a special beam-shaping optics equipment to ensure uniform irradiation of the reaction zone, and a multi-wavelength infrared heating system which ensures that the temperature of the substrate is homogeneous throughout the substrates. TOKYO ELECTRON Triase+ is equipped with a multiple source-feed gas unit which allows for the introduction of multiple gases simultaneously, allowing for more precise control over the reaction atmosphere and creating more uniform processes. It also features an active safety machine, designed to shutdown the reactor if an abnormal heating or cooling situation arises. The reactor also offers advanced process control automation capabilities, allowing recipes to be customized to the process requirements of the user. The tool also features an intuitive, user-friendly interface for easy operation and monitoring of the process parameters. The reaction chamber of Triase+ is designed to ensure optimal uniformity of the thin film produced. It features well-balanced flow rates, low pressure ranges, and optimized temperature distributions in the reaction chamber. TEL / TOKYO ELECTRON Triase+ offers added flexibility and reliability due to its unique design features. TEL Triase+ is an effective and efficient reactor, with high production rates, controllable conditions and uniform process results. Overall, TOKYO ELECTRON Triase+ reactor offers an incredibly precise and user-friendly asset to produce high quality, thin film solar cell materials. The reactor is built for maximum efficiency in a very small package, maintaining a high level of uniformity in the production process and reliable operation within the chosen process parameters.
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