Used THOMAS SWAN / AIXTRON CCS #293630289 for sale
URL successfully copied!
Tap to zoom
THOMAS SWAN / AIXTRON CCS is a plasma-enhanced chemical vapor deposition (PEVCD) reactor designed to manufacture a range of semiconductor films. AIXTRON CCS reactor uses a wide-bore system to provide a large deposition area, giving the system flexibility to produce a range of films for many different applications. The wide-bore system also allows for high throughput and high-precision control of film thickness. THOMAS SWAN CCS is equipped with an Ultra High Frequency (UHF) radio frequency (RF) source and a plasma ionization source to excite the deposition reaction used to create films. The UHF source works to create an alternating electric field between the substrate and the RF source, which then causes the plasma to become ionized and deposit the reactive materials onto the substrate. In addition to the UHF source, CCS also includes a high-power direct current (DC) source to perform the sustained plasma ignition. The DC source works to create a long-lived electric field which helps maintain the plasma formation. It also ensures a consistent plasma ionization, ion energy, and deposition rate. In addition, the DC source allows for very low substrate temperatures, which helps reduce the risk of substrate damage during deposition. THOMAS SWAN / AIXTRON CCS also has multiple inlets for the deposition gas, allowing for controlled and variable concentrations of the precursor materials. The gas inlet also includes a shower head nozzle for a more uniform delivery of the precursor materials for more uniform film deposition. Additionally, AIXTRON CCS includes a bottom up-type susceptor to help keep the substrate at a consistent temperature and pressure that helps to ensure a uniform deposition throughout the film. THOMAS SWAN CCS reactor is designed to be user friendly and its advanced process controls provide users with reliable and repeatable results. CCS reactor is ideal for producing technologically advanced thin films and is suitable for a variety of semiconductors, including transistors and solar cells.
There are no reviews yet