Used ULVAC DWNT #9055163 for sale

ULVAC DWNT is a high-vacuum diffusion-type thermal CVD reactor widely used in semiconductor device production. The reactor consists of a quartz furnace, two separate deposition chambers, and a diffusion chamber, all of which are joined together in one system. The substrate can be easily changed from the outside of the quartz furnace while the temperature of the furnace can be varied and fine-tuned. The diffusion chamber of DWNT contains three zones; the bottom zone is used for source gas introduction and is connected to an exhaust valve. The top zone is where the wafers are loaded, with high-temperature heaters installed below the wafers. Finally, the middle zone houses the shower-head where the reaction gas is inserted, with a high-speed blower fan that creates turbulence for efficient mixing of the gasses. The reaction gas is injected from ULVAC DWNT's shower-head and diffuses through the diffusion chamber before reaching the wafers. The diffusion of the reaction gas enhances the uniformity of the films and ensures that the films will adhere to the substrate properly. The reaction chamber can handle a wide range of process gases including SiH4, PH3 and GeH4. DWNT reactor can maintain a pressure of between 2X10-4 to 8x10-4 Pa. It also provides a high-level of temperature uniformity throughout the chamber, achieving an accuracy of ±1-2°C over a large region of the substrate. The temperature of the chamber can be between 350°C and 900°C, depending on the substrate. ULVAC DWNT reactor is highly accurate, not only in its temperature uniformity but also with controlling the deposition rate and uniformity. It is capable of producing deposition rates of up to 7000 nm/hr with precision of ±2 nm. This makes it a great choice for production of advanced semiconductor devices. Overall, DWNT is an effective and reliable diffusion-type CVD reactor that is capable of producing high-quality films with great uniformity in a variety of process gas environments. Its high level of accuracy and reliability make it a great choice for any production facility.