Used ULVAC EBH-6 #9053833 for sale

'ULVAC EBH-6' is a high-performance, environmentally-friendly, and economical series of Plasma Enhanced Chemical Vapor Deposition (PECVD) reactors designed to allow for precise and efficient deposition of thin film layers on semiconductor substrates. This series of reactors utilises enriched plasma with high energy efficiency and lower operating temperatures to provide consistent and optimised deposition results. Additionally, EBH-6 Series can be used to effectively deposit both inorganic and organic processes, including oxide, nitride, and organic thin films. ULVAC EBH-6 series provides a wealth of feature-rich functionalities to allow users to precisely control the deposition process. This includes a high-precision quartz monitor to measure both real-time and post-process deposition results, as well as a unique computer-controlled arc bias system for precise energy control over deposition rates and film thickness. The built-in pressure control system allows users to adjust the pressure, temperature, and gas flow rate, ensuring optimal process stability and repeatability. EBH-6 series is designed with safety in mind. The mobile aluminum injectors provide an easy-to-use interface with integrated safety systems, such as pressure and temperature control, and ground fault protection. The use of integrated Faraday Cage around the water-cooled electrodes provide protection from the EMI generated by the plasma. Additionally, the built-in safety features allow full control over the vacuum system, even during an emergency lockdown. Furthermore, ULVAC EBH-6 series provides multiple operational modes to allow for optimised efficiency and cost-effectiveness. This includes a standby mode and an energy-saving mode, enabling operators to significantly reduce power consumption and/or adjust production speed for different jobs. These features make EBH-6 highly competitive when it comes to cost savings. Overall, ULVAC EBH-6 series is an ideal choice for those looking for an efficient and economical thin film deposition solution. With its high-performance, precision, and eco-friendliness, it can be relied upon to provide consistent, high-quality results.