Used ULVAC EBS-10A #9053858 for sale
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ULVAC EBS-10A is a sputtering equipment suitable for thin‐film deposition. It operates on a reactive sputtering process, whereby a target material is introduced into a vacuum produced with a vacuum pump. The target is connected to a high voltage power source, which causes the target material to sputter when the voltage is applied. EBS-10A is an easy-to-use system with an automated, self-designed operation panel that allows users to save time and enhance experiment execution. This is accomplished through the automated, high-level commands and self-diagnosis functions implemented on the unit. The user interface has an intuitive graphical design and simple navigation commands. ULVAC EBS-10A has a large effective deposition area, capable of producing thin films up to 13mm on substrates. It uses a three-gun parallel DC-DC reactive sputtering machine that enables optimum compatibility with 3D-structures. EBS-10A is a robust tool with a compact, strong design for increased stability. This ensures reliable and repeatable thin film deposition over long time periods. The asset can also provide high-quality depositions of complex thin films without high-cost consumables. ULVAC EBS-10A utilizes an off-axis type sputtering chamber for high-speed deposition. The chamber is outfitted with a mass-flow controller and circulation plenum model, enabling a wide range of sputtering gas mixtures and speeds, as well as a large substrate capacity. EBS-10A has a host of adjustable parameters for optimal thin film deposition. The equipment features a process region with adjustable pressures and temperature which enable optimization of all parameters for desired results. Additionally, the user can adjust sputtering gas type, deposition origin, power level, and thickness. ULVAC EBS-10A is a powerful and versatile system suitable for many types of thin film deposition tasks. It is an excellent choice for users who need low-maintenance operation and want to have a wide range of control parameters to produce optimum and quality results.
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